SEM Inspection Apparatus Color-Coded Pattern Matching
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Solution Overview
Problem
Conventional SEM inspection techniques fail to accurately correct positional deviations between design data and inspection images, primarily due to the lack of pattern matching and voltage contrast consideration.
Innovation Solution
An SEM inspection apparatus with an arithmetic processor that acquires SEM images and design data, calculates resistance and capacitance components, color-codes wiring lines based on these components, and performs pattern matching to correct coordinate deviations between SEM images and color-coded design data.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional SEM inspection compares inspection images with design data using only voltage contrast, then the inspection process is simple, but the positional deviation between design data and inspection images cannot be corrected
Solution Approach 1:
The patent applies color-coding to design data based on voltage contrast values, creating a visually distinct representation that enables pattern matching. Each wiring line is assigned a color according to its voltage contrast characteristics, allowing the inspection image to be compared with the color-coded design data for accurate positional alignment and deviation correction.
Solution Approach 2:
The patent creates a color-coded copy of the design data that preserves the electrical characteristics (voltage contrast) while adding visual differentiation. This colored copy serves as a reference pattern for matching against the inspection image, enabling precise positional deviation correction without requiring complex transformation algorithms.
2Measurement precision
If pattern matching is performed between design data and inspection images, then coordinate deviation correction is achieved, but the processing time and computational load increase
Solution Approach 1:
The patent performs preliminary color-coding of the design data based on voltage contrast values before the pattern matching process. This pre-processing step organizes the design data into a visually distinct format that accelerates the subsequent pattern matching operation, reducing computational load and processing time while maintaining high correction accuracy.
Solution Approach 2:
The patent applies color-coding locally to individual wiring lines based on their specific voltage contrast characteristics. This localized differentiation creates unique visual signatures for each wiring line, enabling faster and more accurate pattern matching compared to uniform representation methods.
Data Source
AI summary
According to one embodiment, an SEM inspection apparatus includes an arithmetic processor. The arithmetic processor acquires design data corresponding to an inspection region. The arithmetic processor obtains a resistance component between each of wiring lines included in the inspection region and a portion on a substrate connected thereto, on a basis of the design data. The arithmetic processor obtains a capacitance component between each of the wiring lines included in the inspection region and the portion on the substrate connected thereto, on a basis of the design data. The arithmetic processor color-codes the wiring lines included in the inspection region of the design data, on a basis of a combination of the resistance component and the capacitance component. The arithmetic processor corrects a coordinate deviation between an SEM image and the color-coded design data by performing pattern matching between the color-coded design data and the SEM image.