SEM Light Modulation for Multi-Feature Contrast Imaging
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Solution Overview
Problem
Existing scanning electron microscopes struggle to emphasize all desired feature data within a field of view due to varying light absorption characteristics of materials, leading to reduced visibility of ultrafine patterns and defects in semiconductor devices.
Innovation Solution
A charged particle beam device that calculates and controls light irradiation conditions based on the charged particle beam's irradiation conditions to emphasize multiple pieces of feature data by modulating light parameters such as wavelength, intensity, and polarization.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a fixed light irradiation condition is used in a scanning electron microscope, then the observation image can be acquired, but the contrast cannot be optimized for multiple different feature data (material composition, shape pattern, electrical connection) simultaneously
Solution Approach 1:
The patent applies dynamics by making the light irradiation condition variable rather than fixed. The light irradiation unit changes wavelength, intensity, and other parameters dynamically according to the scanned position on the sample, allowing optimal contrast for different feature data types to be achieved across the entire field of view
Solution Approach 2:
The patent applies local quality by setting different light irradiation conditions for different regions or feature types within the field of view. Each scanned position can receive customized light parameters optimized for its specific feature data, such as using different wavelengths for material composition versus shape pattern emphasis
2Measurement precision
If the light irradiation condition is changed to emphasize different feature data, then the contrast for that specific feature is improved, but it becomes difficult to emphasize all desired feature data within a single field of view
Solution Approach 1:
The patent applies continuity of useful action by continuously adjusting the light irradiation conditions during the scanning process. Rather than taking separate images under different conditions, the system maintains continuous optimization across the entire scanning sequence, ensuring all feature data types are emphasized in a single composite image
Solution Approach 2:
The patent applies parameter changes by systematically varying light irradiation parameters (wavelength, intensity, polarization) according to the scanned position and target feature data. This allows the system to optimize contrast for multiple feature types by changing physical parameters of the light rather than requiring multiple separate measurements
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The device achieves an observation image with enhanced contrast for various feature data, allowing clear identification of materials and patterns, even when materials have similar compositions.
Implementation Method 1
a light source 13 and a light irradiation unit 24. The light source 13 emits light. The light irradiation unit 24 irradiates the sample 8 with the light
Implementation Method 2
an electron optical system 2 that irradiates a sample 8 with an electron beam 30. The electron beam 30 scans the sample 8 in an observation area
Data Source
AI summary
An object of the invention is to obtain an observation image in which a plurality of pieces of feature data of a sample are emphasized in a charged particle beam device that acquires an observation image of the sample by irradiating the sample with a charged particle beam and light. The charged particle beam device according to the invention calculates a sequence for modulating a light irradiation condition according to an irradiation condition of a charged particle beam, and controls the light irradiation condition according to the sequence (see FIG. 2).