In-Situ SEM Mechanical Testing With Direct Load Cell Measurement
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Solution Overview
Problem
Current methods for performing quality assurance mechanical tests on packaged microelectronic components are expensive, fragile, and limited in application, often relying on indirect force measurement or being incompatible with ultra-high vacuum and EM-sensitive environments.
Innovation Solution
A system that performs mechanical testing of samples while concurrently imaging them using a scanning beam microscope, featuring a clamping mount, a load cell for direct force measurement, and a controllable probe for applying forces, allowing for real-time measurement and imaging during tests like bond wire pull-tests and adhesion/cohesion testing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If indirect force measurement or probe tip force measurement is used, then force measurement capability is achieved, but measurement precision and reliability deteriorate due to fragility and indirect measurement errors
Solution Approach 1:
A load cell is introduced as an intermediary component between the sample and the testing apparatus. The load cell directly measures the force applied to or from the sample, providing accurate and reliable force data without the fragility issues of probe tip measurement. This intermediary device enables precise force measurement while maintaining system reliability.
Solution Approach 2:
The patent replaces indirect mechanical force measurement methods with direct force measurement using a load cell. This substitution eliminates the need for complex mechanical linkages and indirect calculation methods, providing more accurate and reliable force data throughout the testing process.
2Adaptability or versatility
If expensive desktop commercial systems are used, then comprehensive testing capability is achieved, but device complexity and cost increase
Solution Approach 1:
The testing system is segmented into modular components: a clamping mount for sample fixation, a load cell for force measurement, and a controllable probe for applying forces. This segmentation allows each component to be independently optimized and replaced, reducing overall system complexity while maintaining versatile testing capabilities.
Solution Approach 2:
The system is designed with universal components that can perform multiple testing functions. The controllable probe can apply different types of forces (pull, scratch, crush), and the load cell can measure various force magnitudes, enabling a single system to handle diverse mechanical testing requirements without needing multiple specialized devices.
3Productivity
If purpose-built testing systems are used, then specialized testing capability is achieved, but adaptability to different environments and systems deteriorates
Solution Approach 1:
The testing apparatus is designed with universal mounting interfaces and components that can be adapted to different microscope systems and environmental conditions. The clamping mount and probe assembly can be configured for various sample types and testing modes, allowing the same basic system to operate efficiently in ultra-high vacuum, atmospheric, and other specialized environments.
Solution Approach 2:
The system incorporates dynamic and adjustable components that can be reconfigured for different testing scenarios. The controllable probe can be positioned and oriented differently, and the clamping mount can be adjusted to accommodate various sample geometries, enabling the system to adapt to different environmental requirements and testing needs.
Data Source
AI summary
System and methods are described for directly measuring mechanical properties of a sample while concurrently imaging the sample using a scanning beam microscope (e.g., a scanning electron microscope (SEM)). The system includes a clamping mount configured to hold the sample and a load cell positioned proximal to the clamping mount and configured to provide a direct, real-time measurement of force on the sample end. The system further includes a controllable probe configured to apply a force to the sample. In some embodiments, the sample load cell is tiltably couplable to a sample held by the clamping mount and the controllable probe is moveable between a plurality of different mounting positions relative to the load cell.