SEM Marker Overlay for Multi-Magnification Position Tracking
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Solution Overview
Problem
Scanning electron microscopes with optical imaging capabilities face challenges in maintaining marker visibility across varying magnifications, making it difficult to accurately determine imaging and analysis positions on optical images.
Innovation Solution
The implementation of an image processing method and GUI interface that ensures markers for imaging and analysis positions remain constant in size and color across changes in magnification, using a scanning electron microscope with an optical imaging device, electron source, detectors, and a processor to display these markers on an optical image of the sample.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the magnification of the optical image is increased, then the markers can be confirmed clearly, but the field of view becomes limited and may not show the entire sample context
Solution Approach 1:
The patent introduces a hierarchical navigation system that adds a temporal dimension to the viewing experience. Users can switch between low-magnification overview mode and high-magnification detail mode, with the system automatically tracking and highlighting the current view position. This allows markers to be confirmed clearly at high magnification while maintaining awareness of the overall sample context through the overview map, effectively resolving the contradiction between marker visibility and field of view.
2Area of stationary object
If the magnification of the optical image is decreased to show more context, then the field of view increases, but the markers become too small to be checked
Solution Approach 1:
The patent introduces an intermediary overview map that serves as a separate display layer. This overview map shows the entire sample area at low magnification with marker positions indicated, while the main display can simultaneously show high-magnification views. The intermediary overview map allows users to locate and track markers across different magnification levels without the markers themselves becoming too small to see in the main view.
3Loss of information
If markers are displayed on optical images for position tracking, then imaging positions can be identified, but marker size varies with magnification making them unreliable for position confirmation
Solution Approach 1:
The patent segments the display system into two independent components: the main optical image display and the overview map display. The overview map is segmented to show the entire sample area with all marker positions, while the main display focuses on the current high-magnification view. This segmentation allows position information to be preserved reliably in the overview map while maintaining high imaging detail in the main view, making marker positions reliable regardless of magnification changes.
Data Source
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AI summary
There is provided a scanning electron microscope permitting one to grasp imaging positions and analysis positions with ease. The scanning electron microscope (100) includes a first detector (40) for detecting electrons, a second detector (50) for detecting X-rays, and an image processor section (88) for causing first markers (604) indicative of imaging positions and second markers (606) indicative of analysis positions to be displayed on a display device (92) such that the first and second markers are placed on a whole image (602) of a sample (S). The image processor section (88) alters the magnification of the whole image (602) based on instructions for altering the magnification of the whole image (602) displayed on the display device (92). The image processor section (88) displays new first markers (604) of the same size as the first markers (604) placed on the unaltered magnification whole image (602) such that the new first markers (604) are placed on the altered magnification whole image (602). The image processor section (88) causes new second markers (606) of the same size as the second markers (606) placed on the unaltered magnification whole image (602) to be placed on the altered magnification whole image (602).