SEM Membrane Assembly With Cornerless Aperture for Wider Field of View
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Solution Overview
Problem
Current membrane assemblies for scanning electron microscopes (SEMs) are prone to breaking and have limited field of view when used in non-vacuum environments, making it difficult to analyze samples at atmospheric pressure without compromising the vacuum conditions inside the SEM.
Innovation Solution
A charged particle beam device with a membrane assembly that includes a pressure-sealing membrane and a supporting membrane layer with a cornerless aperture, bonded to a holding frame, allowing for a larger field of view and increased mechanical strength to maintain vacuum conditions while analyzing samples at atmospheric pressure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a membrane assembly is used to separate vacuum and atmospheric pressure environments, then vacuum integrity is maintained, but the membrane is prone to breaking and has limited field of view
Solution Approach 1:
The membrane assembly is segmented into multiple functional layers: a thin pressure-sealing membrane for vacuum integrity, a cornerless aperture structure for enlarged field of view, and a supporting membrane layer for mechanical strength. This segmentation allows each component to optimize its specific function while working together as a unified system.
Solution Approach 2:
The membrane assembly uses composite structure combining different materials and functions: the pressure-sealing membrane (thin, vacuum-tight), the cornerless aperture (structural opening), and the supporting membrane layer (mechanical reinforcement). This composite approach enables simultaneous achievement of vacuum sealing, large aperture, and structural durability.
2Area of stationary object
If a larger aperture is created in the membrane, then field of view is enlarged, but mechanical strength is reduced
Solution Approach 1:
The aperture structure is segmented into a cornerless design where the opening is defined by curved edges rather than sharp corners. This segmentation of the aperture geometry eliminates stress concentration points while maintaining a large open area, thereby preserving both field of view and mechanical strength.
Solution Approach 2:
The aperture employs curved, cornerless edges instead of straight lines and sharp corners. This curvature eliminates stress concentration at corner points, allowing the membrane to maintain large aperture size while preserving mechanical strength and resistance to pressure differential forces.
3Reliability
If a thin membrane is used to maintain vacuum, then transparency to charged particles is improved, but the membrane becomes more fragile
Solution Approach 1:
The membrane system is segmented into two distinct components: the thin pressure-sealing membrane that provides vacuum integrity and charged particle transparency, and the supporting membrane layer that provides mechanical strength. This segmentation allows the thin membrane to fulfill its primary function without bearing the full mechanical load.
Solution Approach 2:
The pressure-sealing membrane utilizes a thin film structure that is highly transparent to charged particles while the supporting membrane layer provides the necessary mechanical reinforcement. This thin-film approach maximizes particle transmission while the composite structure maintains overall robustness.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution provides a robust and enlarged field of view for SEMs, enabling effective sample analysis in non-vacuum environments without compromising the vacuum integrity of the instrument.
Implementation Method 1
a pressure-sealing membrane being substantially transparent to a charged particle beam from the charged particle beam source, a supporting membrane layer being formed with a cornerless aperture, the pressure-sealing membrane being bonded to the supporting membrane layer
Implementation Method 2
for detection of electrons resulting from an interaction of the charged particle beam and the sample
Data Source
AI summary
A charged particle beam device, comprising a charged particle beam source situated in a first-pressure environment, a sample support operative to support a sample situated in a second-pressure environment, the second-pressure environment having a higher pressure than the first-pressure environment, and a membrane assembly separating the first-pressure environment from the second-pressure environment, the membrane assembly comprising a pressure-sealing membrane being substantially transparent to a charged particle beam from the charged particle beam source, a supporting membrane layer being formed with a cornerless aperture, the pressure-sealing membrane being bonded to the supporting membrane layer, and a holding frame being formed with a second aperture larger than and overlying the cornerless aperture. The charged particle beam device may further comprise an electron-detecting subassembly, the electron-detecting subassembly comprising at least one metal line defining a shape, for detection of electrons resulting from an interaction of the charged particle beam and the sample.