Scanning Electron Microscope Automated Imaging Recipe Generation
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Solution Overview
Problem
The existing methods for creating an imaging recipe for scanning electron microscopes are labor-intensive and time-consuming, especially as semiconductor patterns miniaturize, leading to increased complexity and the need for manual intervention, which hampers automation and accuracy.
Innovation Solution
A scanning electron microscope apparatus and method that automatically generates an imaging recipe using CAD data, selecting and registering imaging parameters such as coordinates, size, and sequence for evaluation points, with a relief process to ensure successful imaging, allowing for high accuracy and reduced operator dependency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If manual creation of imaging recipe is used, then imaging accuracy can be ensured through operator expertise, but labor time and operational complexity increase significantly
Solution Approach 1:
The system creates a virtual model of the wafer surface using CAD data to generate the imaging recipe, eliminating the need for actual wafer imaging during recipe creation. This virtual copying approach maintains accuracy while dramatically reducing time loss.
Solution Approach 2:
The system performs preliminary processing of CAD data to pre-determine imaging parameters, evaluation points, and imaging sequences before actual imaging begins. This preliminary action on the virtual model prepares the complete imaging recipe in advance.
2Measurement precision
If actual wafer imaging is performed for recipe creation, then accurate imaging parameters can be obtained, but operational rate of SEM decreases
Solution Approach 1:
Instead of imaging the actual wafer to obtain imaging parameters, the system copies the necessary information from CAD data to create a virtual model, from which all imaging parameters are derived. This eliminates time-consuming actual wafer imaging while maintaining parameter accuracy.
Solution Approach 2:
The system introduces CAD data as an intermediary between the imaging system and the actual wafer. By processing CAD data to extract pattern information and generate imaging parameters, the system mediates the recipe creation process without requiring actual wafer presence, thereby improving operational rate.
3Manufacturing precision
If the number of evaluation points increases due to pattern miniaturization, then inspection coverage improves, but manual recipe creation becomes impractical
Solution Approach 1:
The system enables self-service automated generation of imaging recipes by processing CAD data to automatically determine imaging parameters, select evaluation points, and optimize imaging sequences. This eliminates the need for manual operator intervention even when the number of evaluation points increases significantly.
Solution Approach 2:
The system replaces the manual mechanical process of recipe creation with an automated computational process that processes CAD data to generate imaging parameters. This substitution handles the increased complexity of miniaturized patterns with algorithmic precision rather than manual effort.
4Productivity
If automated recipe creation from CAD data is implemented, then operational efficiency improves, but handling imaging failures requires additional relief processes
Solution Approach 1:
The system prepares multiple candidate imaging sequences and alternative evaluation points in advance during automated recipe generation. When imaging failures occur, the system can switch to pre-prepared alternatives without requiring complex manual intervention, thus maintaining operational efficiency.
Data Source
AI summary
(1) part or all of the number, coordinates and size/shape and imaging sequence of imaging points each for observation, the imaging position change method and imaging conditions can be calculated automatically from CAD data, (2) a combination of input information and output information for imaging recipe creation can be set arbitrarily, and (3) decision is made of imaging or processing at an arbitrary imaging point as to whether to be successful/unsuccessful and in case a failure is determined, a relief process can be conducted in which the imaging point or imaging sequence is changed.