SEM Particle Imaging With Adaptive Scan Speed Switching
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Solution Overview
Problem
Particle analysis using scanning electron microscopes requires long-time measurement due to the need for acquiring and analyzing multiple particle images from large field-of-view ranges.
Innovation Solution
A charged particle beam apparatus and method that employs multiple scanning speeds to capture sample and feature images, including a first mode at a higher speed for overall imaging and a second mode at a lower speed for detailed feature imaging, allowing for efficient trimming of particle images based on the proportion of feature objects in the field of view.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of time
If the measurement unit scans the sample at a high scanning speed to capture sample images, then the acquisition time is reduced, but the image quality and measurement precision deteriorate
Solution Approach 1:
The patent divides the scanning process into two distinct modes: a first mode for capturing sample images at high scanning speed to cover large field-of-view ranges quickly, and a second mode for capturing feature images at low scanning speed to ensure high image quality. This segmentation allows the system to optimize for different requirements in different stages of the imaging process.
Solution Approach 2:
The patent dynamically switches between two scanning modes based on the imaging requirements. The system transitions from a first scanning mode (high speed) used when capturing sample images to a second scanning mode (low speed) when capturing feature images, allowing the scanning speed to adapt to the specific needs of each imaging task.
2Measurement precision
If the measurement unit scans the sample at a low scanning speed to capture high-quality feature images, then the measurement precision is improved, but the acquisition time increases
Solution Approach 1:
The patent segments the imaging process into two phases: initial sample image acquisition at high speed followed by feature image acquisition at low speed only in regions of interest. This prevents the need to scan the entire sample area at low speed, thereby maintaining high image quality while avoiding excessive acquisition time.
Solution Approach 2:
The patent applies different scanning speeds to different regions of the sample. High scanning speed is used for general sample imaging, while low scanning speed is applied specifically to regions containing feature objects where high image quality is required. This local differentiation optimizes both time and quality.
3Productivity
If the system captures sample images from large field-of-view ranges to analyze multiple particles, then the productivity is improved, but the measurement time increases
Solution Approach 1:
The patent segments the field-of-view into multiple regions and processes them in two stages: first capturing sample images from multiple regions at high scanning speed to identify feature objects, then capturing detailed feature images only from regions containing features at low scanning speed. This segmentation strategy enables efficient processing of large areas while maintaining detailed analysis capability.
Solution Approach 2:
The patent performs preliminary scanning at high speed to identify the locations of feature objects before performing detailed imaging. This preliminary action allows the system to avoid spending excessive time imaging empty or non-interest areas, thereby improving overall productivity without sacrificing measurement time for relevant features.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach significantly reduces the time required for acquiring feature images, enabling faster particle analysis and improving the accuracy of EDS analysis by extending measurement time.
Implementation Method 1
a measurement unit that scans a sample with a charged particle beam to capture a sample image
Data Source
AI summary
A charged particle beam apparatus includes a measurement unit that scans a sample with a charged particle beam to capture a sample image; an image acquisition unit that acquires a plurality of sample images captured by the measurement unit from a plurality of regions of the sample, and acquires a feature image that is an image of a feature object contained in the sample from each of the plurality of sample images; and an analysis unit that acquires information on the feature object based on the feature image. The image acquisition unit acquires a plurality of feature images by repeating: processing of selecting one mode from among a plurality of modes to acquire the feature image based on a proportion of a region of the feature object occupying a field of view in an acquired sample image; and processing of acquiring the feature image in the selected mode.