SEM Probe Tip Landing Using Brightness-Based Contact Detection
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Solution Overview
Problem
The traditional manual probe-landing process in scanning electron microscopy is time-consuming and prone to damaging the probe and sample due to collisions, necessitating an automated and efficient method for probe contact determination.
Innovation Solution
An automated probe tip landing method using a scanning electron microscope (SEM) that performs descending operations with coarse and fine motors, coupled with imaging and brightness analysis to determine probe contact through SEM images, ensuring precise and safe landing on the sample surface.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If manual probe-landing process is used, then the probe and sample can be protected from damage, but the process takes a lot of time and is performed slowly
Solution Approach 1:
The patent replaces the manual mechanical operation with an automated system that uses SEM imaging to detect probe-sample contact. The system automatically controls the probe's horizontal movement based on image analysis, eliminating the need for manual operation while maintaining safe landing speeds.
Solution Approach 2:
The patent implements a feedback mechanism where the SEM continuously images the probe tip during the landing process, and the system automatically adjusts the probe's position based on the detected contact point. This real-time feedback enables both speed and safety by preventing excessive force while automating the process.
2Reliability
If manual probe-landing process is used, then the probe and sample can be protected from damage, but manpower is consumed
Solution Approach 1:
The patent enables the system to perform the landing operation autonomously. The SEM automatically images the probe tip, detects contact with the sample, and controls the probe's movement without human intervention. This self-service capability eliminates manpower requirements while maintaining reliable probe and sample protection.
Solution Approach 2:
The patent replaces manual mechanical operation with automated image-based detection and control. The system uses SEM imaging and automatic image processing to determine contact, eliminating the need for human operators while ensuring safe landing through controlled horizontal movement.
3Productivity
If automated probe-landing method is implemented, then productivity is improved, but the complexity of the system increases
Solution Approach 1:
The patent leverages the existing SEM's imaging capability for a dual purpose: both for observing the sample and for detecting probe-sample contact. By making the SEM serve multiple functions, the system achieves automation without adding separate detection devices, thus limiting the increase in system complexity.
Solution Approach 2:
The patent uses the SEM image as an intermediary to detect probe-sample contact. Instead of requiring direct mechanical or electrical contact sensors, the system uses the optical/electronic image as a mediator to indirectly detect the contact event, simplifying the overall system architecture while enabling automation.
4Productivity
If automated probe-landing method is implemented, then productivity is improved, but measurement precision requirements increase
Solution Approach 1:
The patent focuses the imaging and detection on the specific local region where contact occurs - the probe tip and its immediate vicinity on the sample. By concentrating the measurement precision requirements on this small local area rather than the entire sample, the system achieves accurate contact detection while maintaining high productivity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method significantly reduces manpower and time requirements while preventing damage to the probe and sample by accurately determining probe contact, enhancing the efficiency and safety of the probe-landing process.
Implementation Method 1
scanning electron microscope (SEM)... performing an inspection operation during the second descending operation. The inspection operation comprises an imaging operation, scanning the sample to obtain a first image
Implementation Method 2
a determining operation, checking the first image to determine that in the first image, whether a region connected with the probe tip becomes bright
Data Source
AI summary
A probe tip landing method for a measurement system is provided. The probe tip landing method includes performing a first descending operation to lower a probe toward a sample by a first descending distance; performing a second descending operation to lower the probe toward the sample; and performing an inspection operation during the second descending operation. The inspection operation includes an imaging operation, scanning the sample to obtain a first image including a probe tip of the probe; and a determining operation, checking the first image to determine that in the first image, whether a region connected with the probe tip becomes bright. The probe tip landing method further includes in response to the region connected with the probe tip in the first image becoming bright, determining that the probe has contacted a surface of the sample and the probe has landed successfully.