SEM Surface Profile Reconstruction Using Inclination and Height Data
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Solution Overview
Problem
Existing methods for determining the inclination angle of a specimen surface in scanning electron microscopy are inaccurate for large inclination angles, leading to errors in reconstructing the specimen's profile due to reduced signal changes in detection regions.
Innovation Solution
A charged particle beam apparatus and method that includes a charged particle beam source, an irradiation optical system, and detection units to scan and detect particles, with an image processing unit that determines the inclination angle and height of the specimen surface, allowing for accurate reconstruction of the profile using both inclination and height data.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If only inclination angle data is used for profile reconstruction, then the process is simpler, but the reconstruction accuracy deteriorates at large inclination angles
Solution Approach 1:
The patent merges two types of measurement data - inclination angle information and height information - into a unified profile reconstruction process. By combining these complementary data sources, the system achieves accurate profile reconstruction across all inclination angles, overcoming the limitations of using either method alone.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus and method enable more accurate reconstruction of the specimen surface profile by correcting inclination angle errors using height information, improving accuracy even at large inclination angles.
Implementation Method 1
a charged particle beam source that emits a charged particle beam; an irradiation optical system that scans a specimen with the charged particle beam
Implementation Method 2
detecting the electrons emitted from the specimen by the radiation of electrons
Data Source
AI summary
A charged particle beam apparatus acquires a scanned image by scanning a specimen with a charged particle beam, and detecting charged particles emitted from the specimen. The apparatus includes a charged particle beam source that emits the charged particle beam; an irradiation optical system that scans the specimen with the charged particle beam; a plurality of detection units that detects the charged particles emitted from the specimen; and an image processing unit that reconstructs a profile of a specimen surface of the specimen, based on a plurality of detection signals outputted from the plurality of detection units. The image processing unit: determines an inclination angle of the specimen surface, based on the plurality of detection signals; processing to determine a height of the specimen surface, based on the scanned image; and reconstructs the profile of the specimen surface, based on the inclination angle and the height.