In-Lens SEM Relay Unit for High-Voltage Safety
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Solution Overview
Problem
In-lens scanning electron microscopes face safety risks when using the deceleration method due to the need for a long high-voltage cable, which can cause entanglement and accidental removal of the specimen holder, potentially leading to electrical shock or discharge.
Innovation Solution
A relay unit is placed on a supporting base or inside a cover, with a shorter voltage cable connected to the specimen holder, ensuring the specimen holder is inserted before voltage application and preventing accidental removal by routing the high-voltage cable internally, thus enhancing safety.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a long high-voltage cable is used to apply decelerating voltage to the specimen holder in in-lens SEM, then the deceleration method can be implemented, but the cable may become entangled and cause accidental removal of the specimen holder, leading to electrical shock or discharge
Solution Approach 1:
The patent divides the high-voltage cable connection into two segments: a short cable inside the electron optical lens barrel connecting the high-voltage source to a relay unit, and another short cable connecting the relay unit to the specimen holder. This segmentation eliminates the long cable that causes entanglement while maintaining the deceleration method functionality.
Solution Approach 2:
The relay unit acts as an intermediary component between the high-voltage source and the specimen holder. It receives high voltage from the power supply through a short internal cable and transfers it to the specimen holder through another short cable, eliminating the need for a long external high-voltage cable that causes safety issues.
2Ease of operation
If the high-voltage cable is routed externally from the power supply to the specimen holder, then voltage can be applied, but the cable length increases the risk of entanglement and accidental specimen holder removal
Solution Approach 1:
The patent extracts the relay unit from the external cable routing and places it inside the electron optical lens barrel, close to the high-voltage source. This removes the long external high-voltage cable from the system, eliminating the entanglement hazard while preserving voltage application capability.
Solution Approach 2:
The patent changes the spatial dimension of cable routing by moving the connection point from external to internal within the electron optical lens barrel. The high-voltage cable is routed through the internal space of the microscope rather than externally, fundamentally changing the cable management approach and eliminating entanglement risks.
3Adaptability or versatility
If the specimen holder is allowed to be removed for loading/unloading specimens, then specimen change is enabled, but accidental removal with applied voltage causes electrical shock or discharge
Solution Approach 1:
The patent implements preliminary action by requiring the specimen holder to be fully inserted into the electron optical lens barrel before high voltage is applied. The system detects proper insertion and only then enables voltage application, ensuring the holder cannot be accidentally removed while energized. This preliminary positioning action prevents electrical shock risks.
Solution Approach 2:
The patent employs feedback mechanisms through connection sensors that detect whether the specimen holder is properly inserted and whether the high-voltage cable is correctly connected. The system uses this feedback information to control voltage application, preventing voltage from being applied when the holder is not securely in place, thus preventing electrical shock during accidental removal.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration reduces the risk of electrical shock and discharge during deceleration method operations in in-lens SEMs, ensuring safer operation by managing the high-voltage cable routing and preventing specimen holder removal with applied voltage.
Implementation Method 1
a primary electron beam emitted from an electron gun
Implementation Method 2
an accelerating voltage applied from an electron gun to accelerate the primary electron beam
Implementation Method 3
applying a negative voltage of nearly several hundreds of kilovolts to several kilovolts as a decelerating voltage to the specimen and decelerating a primary electron beam immediately in front of the specimen
Implementation Method 4
uses electromagnetic lenses to focus on a specimen a primary electron beam
Implementation Method 5
scan the primary electron beam across the specimen surface by use of electromagnetic or electrostatic deflectors
Implementation Method 6
scan the primary electron beam across the specimen surface by use of electromagnetic or electrostatic deflectors
Data Source
AI summary
Provided is an electron microscope on which a specimen holder to have high voltage applied is mountable. The specimen holder has safety (electric shock prevention) features, and attention is paid to the specimen holder in terms of operability. The microscope includes a specimen holder having a function of applying a voltage to a specimen mount disposed to load a specimen, a voltage source that supplies the voltage to be applied to the specimen mount, a voltage cable connected at one end thereof to the specimen holder, and a relay unit to which the other end of the voltage cable is connected, the relay unit being placed on a supporting base that supports a lens barrel of the electron microscope.