SEM Sample Unit Collision Avoidance via 3D Shape Data

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

Current charged particle beam systems, such as scanning electron microscopes, face challenges in safely moving samples within the sample chamber due to the lack of consideration for the actual three-dimensional shape of the sample, leading to potential collisions with chamber structures, and require user input for maximum sample height, which can be erroneous and burdensome.

Innovation Solution

A charged particle beam system that generates and utilizes three-dimensional shape data for both the sample and chamber structures to control the sample unit's movement, preventing collisions by simulating potential movements and determining safe orientations and positions based on precise shape measurements.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If the sample unit is moved closer to the objective lens to improve measurement precision, then the measurement precision is improved, but the risk of collision with chamber structures increases

Engineering Contradiction:

Improvemeasurement precisionVSAvoidcollision risk

Core Design Contradiction:

Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The system performs preliminary three-dimensional shape measurement of the sample and pre-acquires chamber structure data before movement. The control unit simulates the movement trajectory in advance, calculates the safe movement range based on the sample's actual shape and chamber structures, and determines collision-free paths before executing the actual movement, thereby enabling the sample to be moved closer to the objective lens without collision risk

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The system creates a digital three-dimensional model (copy) of the sample's shape through shape measurement, and uses this digital model to simulate and calculate the movement trajectory. This digital copy allows the control unit to virtually test movement paths and determine safe ranges without physically moving the sample, thus avoiding collisions while achieving optimal positioning

Inventive Principle:

Principle #26Copying

2Device complexity

If the user inputs the maximum height of the sample to control movement, then the device complexity is reduced, but the measurement precision and reliability deteriorate due to erroneous input

Engineering Contradiction:

Improvedevice complexityVSAvoidmeasurement precision

Core Design Contradiction:

Device complexityVSMeasurement precision

Solution Approach 1:

The system performs self-measurement of the sample's three-dimensional shape using an integrated shape measurement unit, eliminating the need for user input of maximum height. The control unit automatically acquires the sample's shape data, calculates the safe movement range based on the actual shape, and controls the movement without user intervention, thereby improving measurement precision while maintaining acceptable device complexity

Inventive Principle:

Principle #25Self-service

Solution Approach 2:

The system replaces the manual input method (mechanical/user-based) with an automated optical measurement system. The shape measurement unit uses optical fields to automatically measure the sample's three-dimensional shape, substituting the user's manual height input with automated optical measurement and computational analysis, thus improving precision without significantly increasing complexity

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

3Productivity

If the sample unit is moved without considering the three-dimensional shape to improve productivity, then the productivity is improved, but the reliability deteriorates due to potential collisions

Engineering Contradiction:

ImproveproductivityVSAvoidreliability

Core Design Contradiction:

ProductivityVSReliability

Solution Approach 1:

The control unit performs preliminary simulation of the sample unit's movement trajectory before actual movement. By pre-calculating the safe movement range based on the sample's three-dimensional shape and chamber structure data, the system determines collision-free paths in advance, enabling rapid and reliable movement without trial-and-error adjustments, thus improving both productivity and reliability

Inventive Principle:

Principle #10Preliminary action

Data Source

PatentUS11217422B2Charged particle beam system and method of measuring sample using scanning electron microscope

Publication Date: 2022.01.04 JEOL LTD

AI summary

First shape data representing a three-dimensional shape of a sample unit including a sample is generated based on a result of three-dimensional shape measurement of the sample. Second shape data representing a three-dimensional shape of a structure which exists in a sample chamber is generated. Movement of the sample unit is controlled based on the first shape data and the second shape data such that collision of the sample unit with the structure does not occur.