SEM Sparse Sampling Control for Consistent Restored Image Quality
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Solution Overview
Problem
In scanning electron microscopy (SEM), the image quality of restored images based on sparsely sampled images varies significantly with changes in observation conditions such as magnification or visual field, leading to inconsistent resolution and impaired observation throughput and usability.
Innovation Solution
A sample image observation device and method that synchronizes the electron beam irradiation conditions with observation conditions using a storage unit to maintain consistent image quality, by storing correlations between irradiation conditions and observation conditions, and dynamically adjusting the irradiation proportion based on the structure size of the sample.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If sparsely sampled image restoration is used to reduce electron beam irradiation, then sample damage is reduced, but image quality and spatial resolution become inconsistent when observation conditions change
Solution Approach 1:
The patent implements dynamic adjustment of irradiation proportion based on observation conditions. The control unit changes the proportion of pixels irradiated with electron beams according to magnification and visual field information, making the sparse sampling strategy adaptive rather than static. This resolves the contradiction by allowing image quality to be maintained across different observation conditions while still reducing overall sample damage compared to full scanning.
Solution Approach 2:
The patent changes the parameter of irradiation proportion dynamically. By adjusting this parameter based on observation magnification and visual field, the system optimizes the balance between sample damage reduction and image quality maintenance. Different observation conditions trigger different irradiation proportions, ensuring consistent restored image quality while minimizing electron beam exposure.
2Productivity
If fixed irradiation proportion is used during observation, then observation throughput is improved, but restored image quality becomes insufficient when observation conditions change
Solution Approach 1:
The system transitions from static to dynamic control of irradiation proportion. The control unit continuously monitors observation conditions (magnification, visual field) and adjusts the irradiation proportion accordingly. This dynamic approach maintains sufficient restored image quality across varying observation conditions while preserving high observation throughput by avoiding full scanning.
Solution Approach 2:
The patent implements a feedback mechanism where the control unit receives observation condition information and adjusts irradiation proportion based on this feedback. The system uses observation magnification and visual field information as feedback signals to dynamically optimize the irradiation strategy, ensuring both image quality and throughput requirements are met.
3Measurement precision
If electron beam irradiation is increased to improve image quality, then spatial resolution improves, but sample damage increases
Solution Approach 1:
The patent applies local quality by selectively irradiating only certain pixels (sparse sampling) rather than uniformly irradiating all pixels. The control unit determines which pixels to irradiate based on observation conditions, concentrating electron beam exposure on critical regions while leaving other areas unirradiated. This local approach maintains necessary spatial resolution in observed regions while minimizing overall sample damage.
Solution Approach 2:
The patent uses partial action by irradiating only a portion of pixels rather than all pixels. By applying electron beam irradiation to a sparse subset of pixels and using computational restoration to reconstruct the full image, the system achieves sufficient spatial resolution with significantly reduced electron beam exposure and sample damage compared to full scanning.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach maintains constant restored image quality regardless of changes in observation conditions, enhancing observation throughput and usability while reducing sample damage.
Implementation Method 1
A scanning electron microscope (SEM) detects signal electrons generated when a converged probe electron beam irradiates and scans a sample
Data Source
AI summary
To provide a sample image observation device and a method that restore an image based on a sparsely sampled image and that can improve observation throughput and usability by maintaining a restored image quality constant regardless of a change in an observation condition. In a sample image observation device that irradiates a part of an observation area of the sample 19 with an electron beam and restores an image including a pixel not irradiated with the electron beam, the control system 22 includes a storage unit configured to store a correlation between an irradiation condition of irradiating the observation area of the sample with the electron beam and an observation condition of the sample, a control unit configured to synchronize an irradiation proportion of the electron beam with the observation condition based on the correlation, and an input unit configured to input sample information on the sample.