Scanning Electron Microscope X-ray Nano-radiography
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Solution Overview
Problem
Current methods for nano-radiography and nanotomography require separate setups and processes, limiting the ability to simultaneously achieve high-resolution imaging of both surface and internal structures of a sample within a single operation.
Innovation Solution
A method and device that utilizes a scanning electron microscope to emit bremsstrahlung and fluorescent X-ray radiation simultaneously with the electron beam, allowing for the detection of X-ray attenuation through the sample, enabling nano-radiography and nanotomography with enhanced resolution and simultaneous surface scanning.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If separate setups are used for surface microscopy and internal structure radiography, then each imaging mode can be optimized independently, but the imaging process requires multiple operations and loses time efficiency
Solution Approach 1:
The patent combines surface microscopy and internal structure radiography into a single integrated setup by positioning an X-ray detector behind the sample within the electron microscope column. This allows simultaneous acquisition of both surface morphology (via electron detection) and internal structure (via X-ray transmission imaging) during a single scanning operation, eliminating the need for separate imaging processes while maintaining high resolution in both modes.
Solution Approach 2:
The imaging system is designed to perform multiple functions simultaneously: the electron beam serves both to scan the surface for microscopy and to generate X-rays for transmission radiography. The same scanning process produces both electron micrographs and X-ray images, making the system universal and eliminating redundant operations.
2Productivity
If a single setup is used for both surface scanning and internal structure imaging, then time efficiency improves, but the device complexity increases
Solution Approach 1:
The patent introduces an X-ray detector as an intermediary component positioned behind the sample to detect transmitted X-rays. This detector serves as the key additional element that enables internal structure imaging without requiring a completely separate setup. The detector is integrated into the existing electron microscope column, adding functionality while leveraging the existing scanning infrastructure.
3Measurement precision
If X-ray radiation is emitted from the electron beam impact point, then nano-radiography with high resolution is achieved, but the sample must be transparent to X-rays for internal structure visualization
Solution Approach 1:
The system achieves high-resolution nano-radiography by localizing X-ray emission precisely at the electron beam impact point on the sample surface. This localized X-ray source creates a focal point that projects through the sample with high spatial resolution. The method works effectively for samples that are relatively thin or have regions of varying density, allowing internal structure visualization where X-ray transmission is sufficient.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables high-resolution three-dimensional modeling of internal structures with tens of nanometer resolution, while maintaining surface imaging capabilities, thus providing a time-efficient and comprehensive imaging solution.
Implementation Method 1
simultaneously with the impact of the electron beam on a point on the scanned surface of the sample, bremsstrahlung and fluorescent radiation is emitted
Implementation Method 2
simultaneously with the impact of the electron beam on a point on the scanned surface of the sample, bremsstrahlung and fluorescent radiation is emitted
Implementation Method 3
The intensity of this radiation is partly attenuated by the sample according to the density and material distribution in the volume of the sample
Data Source
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AI summary
The invention describes a method and a device (9) for executing a method of X-ray nano-radiography and nanotomography using a scanning electron microscope (1) consisting of the focus of an electron beam (2) from an electron microscope (1) onto one point of the surface of a scanned sample (3), the emission of bremsstrahlung and fluorescent radiation (6) from the focal point of the impact of the electron beam (2), the sensing of the scanned sample (3), and recording an image of the structure of the scanned sample (3) based on the change of intensities of the bremsstrahlung and fluorescent radiation (6) by the imaging detector (7) arranged behind the sample (3).