Semi-Closed Magnetic Core for Localized Field Application in EBL
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Solution Overview
Problem
Existing Electron Beam Lithography (EBL) systems cannot directly observe and measure in-situ electrical/magnetic signals of nano materials and devices due to electron beam deflection from external magnetic or electric fields, limiting their ability to apply localized magnetic/electric fields.
Innovation Solution
A magnetic-field applying device with a semi-closed frame structure, using a coil and magnetic conductive soft iron core, and movable magnetic poles to generate and apply a localized magnetic field within a vacuum chamber, allowing for precise control and minimization of stray fields.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a magnetic field is introduced into the EBL system for in-situ measurement, then the measurement capability of nano-magnetic materials is improved, but the electron beam deflection and focusing interference worsen
Solution Approach 1:
The magnetic field application is segmented into localized regions through movable magnetic poles that can be positioned at specific locations within the vacuum chamber, rather than applying a global magnetic field. This allows measurement capabilities to be added without compromising electron beam focusing in other regions.
Solution Approach 2:
Movable magnetic poles serve as intermediaries between the magnetic field generation device and the sample. These poles can be precisely positioned to apply magnetic fields only where needed for measurement, while maintaining electron beam integrity in patterning regions.
2Adaptability or versatility
If a magnetic field generation device is added to the EBL system, then the functionality for studying nano-magnetic materials is improved, but the device complexity increases
Solution Approach 1:
The movable magnetic poles are designed to serve multiple functions: they can be positioned to apply magnetic fields for measurement, moved out of the way during patterning operations, and configured in different arrangements for various measurement geometries. This multi-functionality reduces the need for separate dedicated measurement equipment.
Solution Approach 2:
The magnetic poles are made movable rather than fixed, allowing them to be dynamically positioned based on operational requirements. This dynamic configuration enables the system to switch between patterning mode (poles retracted) and measurement mode (poles positioned), reducing overall system complexity.
3Area of stationary object
If a global magnetic field is applied for in-situ measurement, then the measurement coverage is improved, but the interference with electron beam scanning worsens
Solution Approach 1:
Instead of applying a uniform global magnetic field, the system uses localized magnetic fields generated by movable poles positioned close to the sample surface. This creates strong magnetic fields in specific measurement regions while maintaining minimal field strength in electron beam scanning regions, thereby reducing beam deflection.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the precise application of local magnetic and electric fields within the EBL system, reducing interference with the electron beam and allowing for effective measurement and patterning of nanostructures, enhancing the capability to study and analyze nano-magnetic materials and devices.
Implementation Method 1
the magnetic-field generation device comprises a coil and a magnetic conductive soft iron core, the power supply is connected to the coil, the coil is wound on the magnetic conductive soft iron core to generate a magnetic field
Implementation Method 2
the magnetic conductive soft iron core leads the magnetic field generated by the coil into the vacuum chamber
Data Source
Figure 1~2A
Figure 2B~2C
Figure 3A~3B
AI summary
Disclosed are a nano-patterned system and a magnetic-field applying device thereof. The nano-patterned system comprises a vacuum chamber, a sample stage and a magnetic-field applying device. The magnetic-field applying device comprises a power supply, a magnetic-feld generation device and a pair of magnetic poles. The magnetic-field generation device comprises a coil and a magnetic conductive soft iron core. The power supply is connected to the coil, and the coil is wound on the magnetic conductive soft iron core to generate a magnetic field. The magnetic conductive soft iron core is of a semi-closed frame structure, and the magnetic poles are respectively arranged at the two ends of the semi-closed frame structure. The sample stage is arranged inside a vacuum chamber of the nano-patterned system. The magnetic poles are oppositely arranged inside the vacuum chamber relative to the sample stage. The coil and the magnetic conductive soft iron core are arranged outside the vacuum chamber. The magnetic conductive soft iron core leads the magnetic field generated by the coil into the vacuum chamber. The magnetic poles are used for locating a sample on the sample stage and applying a local magnetic field.