Abnormality Data Management in Semiconductor Substrate Processing
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Solution Overview
Problem
Conventional band management methods in semiconductor manufacturing are inadequate in distinguishing between non-critical deviations in monitor data and actual abnormalities, leading to potential false alarms due to temporary noise or overshoot, which degrades abnormality detection performance.
Innovation Solution
A management device that stores measurement data from a substrate processing apparatus, sets a predetermined measurement range with reference data and limit values, counts instances where data exceeds these limits, and determines abnormality based on a predefined threshold, thereby differentiating between transient noise and significant deviations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If band management is performed by simply determining whether monitor data falls within the band, then the detection process is simple and fast, but temporary noise or overshoot may be determined to be abnormalities leading to erroneous reporting
Solution Approach 1:
The system performs preliminary actions by pre-calculating and storing multiple bandwidth values (first bandwidth for noise filtering, second bandwidth for abnormality detection) before actual monitoring. When monitor data is received, the system first determines if data falls within the first bandwidth range to filter out noise, and only then checks against the second bandwidth for actual abnormality detection. This preliminary filtering action prevents temporary noise from triggering false alarms while maintaining fast detection speed.
2Measurement precision
If the bandwidth is adjusted to reduce false alarms from noise, then abnormality detection precision improves, but the ability to detect actual abnormalities may be degraded
Solution Approach 1:
The bandwidth determination process is segmented into two distinct stages with different bandwidth values. The first bandwidth (first determination bandwidth) is used for noise filtering with a wider range to accommodate temporary variations. The second bandwidth (second determination bandwidth) is used for actual abnormality detection with a narrower, more precise range. This segmentation allows the system to handle noise and detect abnormalities with different precision levels appropriate to each function, preventing false alarms while maintaining reliable abnormality detection.
3Ease of operation
If adjustment is made only to the width of the band, then the system remains simple to operate, but the precision of detecting abnormalities degrades when waveforms have significant noise or overshoot
Solution Approach 1:
The system dynamically selects between different bandwidth values based on the characteristics of the monitor data. When data shows temporary variations within the first bandwidth range, the system dynamically adjusts by accepting these as normal fluctuations. When data exceeds this range, the system dynamically switches to using the second bandwidth for evaluation. This dynamic adaptation allows the system to maintain simplicity in operation while achieving high precision in abnormality detection, as the bandwidth automatically adjusts to the data conditions without requiring complex manual configuration.
Data Source
AI summary
A management device includes a measurement data storage unit configured to store measurement data transmitted from a substrate processing apparatus; a setting unit configured to set an item of the measurement data as a determination target, reference data, and upper and lower limit values with respect to the reference data; a counting unit configured to count the number of times that the value of the measurement data corresponding to the item exceeds the upper and lower limit values; and a determining unit configured to determine that the measurement data as a determination target is abnormal, when the counted number exceeds a predetermined value.