Semiconductor Adhesive Composition for High-Speed Dicing

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Solution Overview

Problem

Existing adhesive compositions for semiconductor bonding face challenges such as low light transmittance, difficulty in detecting alignment marks, delamination, and poor heat resistance, especially when used with high-pin-count bump electrodes and during high-speed dicing processes, leading to contamination and defects.

Innovation Solution

An adhesive composition comprising an organic-solvent-soluble polyimide, an epoxy compound, and a hardening accelerator, with a specific ratio and structure that allows for high light transmittance, precise alignment mark detection, and stable bonding, even at high speeds, while minimizing defects and contamination.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If adhesive composition contains inorganic filler or micro capsule to improve bonding strength, then bonding reliability is improved, but light transmittance decreases making alignment mark detection impossible

Engineering Contradiction:
Improvebonding reliabilityVSAvoidlight transmittance
Core Design Contradiction:
ReliabilityVSIllumination intensity

Solution Approach 1:

The patent changes the chemical composition parameters of the adhesive by using a polyimide resin with specific molecular weight range (10,000-100,000) and controlling the ratio of soluble resin to total resin between 20-80 wt%, achieving both high bonding reliability and light transmittance of 70% or more without requiring inorganic fillers

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent creates a composite adhesive system combining polyimide resin with specific physical properties (solubility in organic solvents, molecular weight characteristics) rather than using traditional inorganic filler-based composites, achieving dual functionality of structural integrity and optical transparency

Inventive Principle:
Principle #40Composite materials

2Measurement precision

If adhesive composition is made thinner to enable bump electrode position detection, then alignment detection is improved, but bonding strength decreases causing bad connection

Engineering Contradiction:
Improvebump electrode position detection precisionVSAvoidbonding strength
Core Design Contradiction:
Measurement precisionVSStrength

Solution Approach 1:

The patent changes the rheological and bonding parameters of the adhesive by controlling polyimide molecular weight and solvent content, enabling the adhesive to maintain high bonding strength at reduced thicknesses where bump electrode positions remain detectable

Inventive Principle:
Principle #35Parameter changes

3Productivity

If dicing is carried out at high speed to improve productivity, then production efficiency is improved, but contamination with dicing dust and defects increase

Engineering Contradiction:
Improvedicing speedVSAvoiddicing dust contamination
Core Design Contradiction:
ProductivityVSObject-affected harmful factors

Solution Approach 1:

The patent applies beforehand cushioning by forming a protective adhesive layer on the semiconductor wafer before dicing, which cushions against dicing dust contamination and mechanical defects during high-speed cutting processes

Inventive Principle:
Principle #11Beforehand cushioning (Prior cushioning)

Solution Approach 2:

The patent modifies the adhesive layer parameters (composition, thickness, curing properties) to optimize its protective function during high-speed dicing, enabling contamination-free cutting at increased productivity

Inventive Principle:
Principle #35Parameter changes

4Reliability

If adhesive composition uses conventional materials to achieve bonding, then bonding function is achieved, but heat resistance and delamination resistance are insufficient

Engineering Contradiction:
Improvebonding functionVSAvoidheat resistance
Core Design Contradiction:
ReliabilityVSTemperature

Solution Approach 1:

The patent employs a composite material system based on polyimide resin with specific molecular weight and solubility characteristics, providing inherent high heat resistance and delamination resistance while maintaining bonding functionality

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The patent changes the thermal stability parameters of the adhesive by selecting polyimide resin with specific structural characteristics and molecular weight range, achieving superior heat resistance without sacrificing bonding performance

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The adhesive composition enables precise and reliable bonding of semiconductor chips to circuit substrates with high-pin-count bump electrodes, maintaining alignment mark visibility and reducing defects during dicing, and provides stable electrical conduction and heat resistance.

Implementation Method 1

an adhesive composition for semiconductor comprising an organic-solvent-soluble polyimide (a), an epoxy compound (b) and a hardening accelerator (c)

Methodology Applied
Scientific EffectAdhesion: Adhesive

Implementation Method 2

it has a light transmittance of 70% or more

Methodology Applied
Scientific EffectLight transmittance: Light

Implementation Method 3

an epoxy compound (b) and a hardening accelerator (c)

Methodology Applied
Scientific EffectChemical bonding: Chemical Bonding

Implementation Method 4

provides stable electrical conduction and heat resistance

Methodology Applied
Scientific EffectThermal resistance: Thermal Insulation

Data Source

PatentUS8653202B2Adhesive composition for semiconductor, semiconductor device making use of the same and process for producing semiconductor device
Publication Date: 2014.02.18 TORAY INDUSTRIES INC
  • US8653202B2 patent drawing
  • US8653202B2 patent drawing
  • US8653202B2 patent drawing

AI summary

An adhesive composition for semiconductor containing an organic-solvent-soluble polyimide (a), an epoxy compound (b) and a hardening accelerator (c), wherein per 100 wt parts of the epoxy compound (b), there are contained 15 to 90 wt parts of the organic-solvent-soluble polyimide (a) and 0.1 to 10 wt parts of the hardening accelerator (c), wherein the epoxy compound (b) contains a compound being liquid at 25° C. under 1.013×105 N/m2 and a compound being solid at 25° C. under 1.013×105 N/m2, and wherein a ratio of compound being liquid based on all the epoxy compounds is 20 wt % or more and 60 wt % or less.