Semiconductor Structure With Aligned Transistors for Lower Resistance
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Solution Overview
Problem
With the miniaturization of semiconductor devices, the interconnection resistance of adjacent conductors increases, leading to a decrease in driving current under the same driving voltage, which affects the driving ability and increases power consumption.
Innovation Solution
A semiconductor structure is designed with aligned transistors sharing a common source plate, using single crystal semiconductor channels, and drain contacts connected to even numbers of transistors, with magnetic tunnel junctions on the drain contacts, ensuring stable signal transmission and reduced contact resistance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If the contact area between conductors is decreased to achieve miniaturization, then the device size is reduced, but the interconnection resistance increases and driving current decreases
Solution Approach 1:
Multiple transistors share common source and drain contacts, merging previously separate contact structures. This reduces the total number of contacts while maintaining transistor functionality, thereby reducing interconnection resistance and improving driving ability despite miniaturization
Solution Approach 2:
The common source and drain contacts serve multiple transistors simultaneously, making these contacts multi-functional. This universal approach reduces the overall contact area required while maintaining electrical connectivity for all transistors, resolving the contradiction between miniaturization and driving ability
2Reliability
If the driving voltage is increased to maintain driving current, then the driving ability is maintained, but the power consumption increases
Solution Approach 1:
By merging source and drain contacts to serve multiple transistors, the interconnection resistance is reduced. This allows the device to maintain adequate driving current at lower voltages, thereby reducing power consumption while preserving driving ability
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The structure maintains a larger driving current under preset voltage, reduces power consumption, and enhances signal transmission stability, thus improving the performance and competitiveness of electronic devices.
Implementation Method 1
a plurality of magnetic tunnel junctions, located on the drain contacts and electrically connected with the drain contacts in one-to-one correspondence
Data Source
AI summary
A semiconductor structure, a manufacturing method therefor and a memory are provided. The semiconductor structure may at least include: a plurality of aligned transistors, in which the transistors share a same source plate, channels of the transistors are located above the source plate, the channel length direction of the transistors is perpendicular to a surface of the source plate, and a material of the channels includes a single crystal semiconductor; a plurality of drain contacts, electrically connected with drains of the transistors, in which even number of the transistors share one same drain contact; and a plurality of magnetic tunnel junctions, located on the drain contacts and electrically connected with the drain contacts in one-to-one correspondence.