Semiconductor Alignment Pin Assembly for Faster Maintenance Reset
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Solution Overview
Problem
Semiconductor manufacturing apparatuses require regular cleaning or component replacement, which is time-consuming and affects manufacturing yield.
Innovation Solution
A semiconductor manufacturing apparatus featuring a pin and locking plate system that allows for precise alignment and coupling of components, enabling efficient alignment memory and rapid repositioning of structures during maintenance, thereby reducing process time.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If components are cleaned or replaced regularly, then reliability is improved, but loss of time increases
Solution Approach 1:
Alignment pins and locking plates are pre-installed on the support structure before the boat is removed during maintenance. This preliminary preparation allows for rapid repositioning of the boat after cleaning or replacement, significantly reducing the time required for maintenance operations while ensuring proper alignment is maintained throughout the process.
Solution Approach 2:
The invention replaces complex mechanical alignment systems with a simpler pin-and-locking-plate mechanism. The alignment pins fit into corresponding holes to define precise positions, while locking plates secure the pins in place, eliminating the need for complex adjustable mechanical alignment systems and reducing maintenance time.
2Manufacturing precision
If alignment precision is improved, then manufacturing precision is improved, but device complexity increases
Solution Approach 1:
The invention uses alignment pins as physical copies or replicas of the ideal alignment positions. The pins are manufactured with precise dimensions and positions that replicate the required alignment specifications, allowing the boat to be quickly and accurately repositioned without complex measurement and adjustment procedures.
Solution Approach 2:
The invention extracts the essential alignment function from a complex mechanical alignment system and isolates it into simple, discrete alignment pins and locking plates. This extraction maintains the necessary alignment precision while dramatically simplifying the overall system structure and reducing the number of moving parts.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables faster maintenance and alignment of components, improving manufacturing efficiency and yield by minimizing the time required for cleaning and repositioning processes.
Implementation Method 1
the coupling member uses magnetism to couple the first pin to or separate the first pin from the second pin
Data Source
AI summary
A semiconductor manufacturing apparatus includes a first structure having a first hole, a second structure on the first structure, the second structure including a space for accommodating a substrate and a lower plate with a second hole, a first pin insertable into the first hole, the first pin having a same diameter as the first hole and a length smaller than a length of the first hole in a vertical direction, a second pin insertable into the second hole and on the first pin, the second pin having a same diameter as the second hole, a locking plate between the first pin and the second pin, the locking plate overhanging a side wall of the first pin, and a coupling member configured to couple the first pin to or separate the first pin from the second pin.