Semiconductor Package Anchor Conductive Layer

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Solution Overview

Problem

Conventional semiconductor packages face issues of high cost, decreased reliability, and large package sizes, leading to inefficiencies in manufacturing and potential structural failures due to mechanical or thermal stress.

Innovation Solution

A semiconductor package design featuring a conductive layer with an anchor region that extends through at least one dielectric layer, providing stability and preventing cracks or delamination by anchoring the conductive layer to the semiconductor die, and an under bump metal structure connected to the anchor region for enhanced structural integrity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional semiconductor package structures are used, then manufacturing processes are simpler, but reliability decreases due to cracks and delamination under mechanical or thermal stress

Engineering Contradiction:
Improvestructural reliabilityVSAvoidpackage structure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The conductive layer is divided into multiple segments: a first conductive layer with anchor portions extending into openings in the dielectric layer, and a second conductive layer formed afterward. This segmentation allows each layer to perform specific functions - the first layer provides mechanical anchoring while the second layer provides electrical connectivity, thereby preventing delamination and cracks while maintaining manufacturing feasibility

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The conductive layer transitions from a purely two-dimensional planar structure to a three-dimensional structure with anchor portions that extend vertically into the dielectric layer. This dimensional change creates mechanical interlocking that prevents delamination and crack propagation, significantly improving structural reliability without excessively complicating the manufacturing process

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Ease of manufacture

If conventional conductive layer designs are used, then manufacturing costs are lower, but package size increases and manufacturability decreases

Engineering Contradiction:
ImprovemanufacturabilityVSAvoidconductive layer structure complexity
Core Design Contradiction:
Ease of manufactureVSDevice complexity

Solution Approach 1:

The first conductive layer with anchor portions is formed in advance, extending into openings in the dielectric layer before the second conductive layer is deposited. This preliminary action creates a pre-prepared anchoring structure that simplifies subsequent manufacturing steps and improves overall manufacturability, even though it adds initial structural complexity

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The anchor portions of the first conductive layer are nested within openings in the dielectric layer, creating a interlocked structure. This nesting approach allows the conductive layers to be embedded within the dielectric matrix, reducing overall package size while improving ease of manufacture through integrated structure formation

Inventive Principle:
Principle #7Nested doll (Nesting)

3Reliability

If conventional conductive layer configurations are used, then manufacturing costs are reduced, but reliability decreases due to excessive package size and structural failures

Engineering Contradiction:
Improvedevice reliabilityVSAvoidpackage size
Core Design Contradiction:
ReliabilityVSQuantity of substance

Solution Approach 1:

The dielectric layer has non-uniform properties with openings strategically positioned to receive anchor portions of the conductive layer. This local variation in dielectric structure creates targeted mechanical anchoring zones that prevent delamination and crack propagation, improving reliability while minimizing the overall quantity of material required in the package structure

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The package structure combines multiple materials with different properties: dielectric material providing mechanical support and insulation, and conductive materials providing electrical connectivity and structural anchoring. This composite approach creates a multi-functional structure that improves reliability through material synergies while optimizing package size by eliminating redundant materials

Inventive Principle:
Principle #40Composite materials

Data Source

PatentUS9780024B2Semiconductor package and manufacturing method thereof
Publication Date: 2017.10.03 AMKOR TECH SINGAPORE HLDG PTE LTD
  • US9780024B2 patent drawing
  • US9780024B2 patent drawing
  • US9780024B2 patent drawing

AI summary

A semiconductor package and a method of making a semiconductor package. As non-limiting examples, various aspects of this disclosure provide various semiconductor packages, and methods of making thereof, that comprise a conductive layer that comprises an anchor portion extending through at least one dielectric layer.