Semiconductor Anode Layer Local Quality for Wire Bonding Cracks

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Solution Overview

Problem

Conventional semiconductor devices fail to simultaneously reduce recovery loss and reverse recovery current while preventing cracks during wire bonding, as they are susceptible to damage from foreign substances during the bonding process.

Innovation Solution

A semiconductor device with a p-type anode layer comprising a first layer with higher impurity concentration under the wire connection area and a second layer with lower impurity concentration excluding the connection area, which reduces recovery loss and reverse recovery current while minimizing crack influence during wire bonding.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of energy

If impurity concentration of p-type anode layer is lowered to reduce injection efficiency, then recovery loss and reverse recovery current are reduced, but the anode layer becomes susceptible to cracks during wire bonding

Engineering Contradiction:
Improverecovery lossVSAvoidcrack resistance
Core Design Contradiction:
Loss of energyVSReliability

Solution Approach 1:

The patent applies local quality by creating different impurity concentration zones within the p-type anode layer. The region under the wire bonding area has higher impurity concentration to resist cracks, while other regions have lower impurity concentration to reduce recovery loss and reverse recovery current. This spatial variation in material properties resolves the contradiction between energy loss reduction and crack resistance.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The p-type anode layer is segmented into multiple regions with different impurity concentrations. Specifically, it is divided into a first region (under wire bonding area) with higher impurity concentration and a second region (other areas) with lower impurity concentration. This segmentation allows each region to fulfill different functional requirements simultaneously.

Inventive Principle:
Principle #1Segmentation

2Object-generated harmful factors

If impurity concentration of p-type anode layer is lowered to reduce reverse recovery current, then reverse recovery current is reduced, but the anode layer becomes susceptible to cracks during wire bonding

Engineering Contradiction:
Improvereverse recovery currentVSAvoidcrack resistance
Core Design Contradiction:
Object-generated harmful factorsVSReliability

Solution Approach 1:

The patent applies local quality by creating different impurity concentration zones within the p-type anode layer. The region under the wire bonding area has higher impurity concentration to resist cracks, while other regions have lower impurity concentration to reduce recovery loss and reverse recovery current. This spatial variation in material properties resolves the contradiction between energy loss reduction and crack resistance.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The p-type anode layer is segmented into multiple regions with different impurity concentrations. Specifically, it is divided into a first region (under wire bonding area) with higher impurity concentration and a second region (other areas) with lower impurity concentration. This segmentation allows each region to fulfill different functional requirements simultaneously.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively reduces recovery loss and reverse recovery current while suppressing crack formation during wire bonding, enhancing the semiconductor device's performance and reliability.

Implementation Method 1

an impurity concentration of the first p-type anode layer is higher than an impurity concentration of the second p-type anode layer

Methodology Applied
Scientific EffectImpurity concentration gradient:

Implementation Method 2

impurity concentration of a p-type anode layer is lowered to reduce injection efficiency of holes serving as carriers to be injected from the p-type anode layer into an n-type cathode layer

Methodology Applied
Scientific EffectCarrier injection:

Data Source

PatentUS10658523B2Semiconductor device and manufacturing method thereof
Publication Date: 2020.05.19 MITSUBISHI ELECTRIC CORP
  • US10658523B2 patent drawing
  • US10658523B2 patent drawing
  • US10658523B2 patent drawing

AI summary

The semiconductor device according to the present invention includes: an n-type semiconductor substrate; a p-type anode layer provided in a front surface of the n-type semiconductor substrate; an anode electrode provided on the p-type anode layer; and a wire connected to the anode electrode, the p-type anode layer includes: a p+-type anode layer disposed to include a position right under a portion where the wire is connected; and a p−-type anode layer disposed to exclude the position right under the portion where the wire is connected, and an impurity concentration of the p+-type anode layer is higher than an impurity concentration of the p−-type anode layer.