Semiconductor Apparatus Back Surface Peripheral Layer Short-Circuit Capability

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Solution Overview

Problem

Semiconductor apparatuses have limited short-circuit capability due to high back surface electric field strength at the pn junction formed by the n− drift region and p+ collector layer, leading to premature breakdown during high voltage periods, especially during load short circuits.

Innovation Solution

Incorporating a p+ back surface peripheral layer with a higher hole concentration than the p+ collector layer in the peripheral region, which injects additional holes into the n− drift region, reducing the back surface electric field strength and enhancing the short-circuit capability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If a p+ collector layer is formed on the back surface to ensure breakdown voltage, then the breakdown voltage is improved, but the short-circuit capability deteriorates due to high back surface electric field strength

Engineering Contradiction:
Improvebreakdown voltageVSAvoidshort-circuit capability
Core Design Contradiction:
StrengthVSReliability

Solution Approach 1:

The back surface structure is segmented into two distinct regions: a first region with a p+ collector layer having a first hole concentration, and a second region with a p+ back surface peripheral layer having a second hole concentration higher than the first. This segmentation allows different regions to serve different functions - the first region ensures breakdown voltage while the second region reduces back surface electric field strength to improve short-circuit capability.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different hole concentrations are applied to different regions of the back surface. The p+ back surface peripheral layer in the second region has a higher hole concentration than the p+ collector layer in the first region, creating local quality variations that optimize both breakdown voltage and short-circuit capability in their respective regions.

Inventive Principle:
Principle #3Local quality

2Strength

If the hole concentration in the p+ collector layer is increased to improve breakdown voltage, then the breakdown voltage is improved, but the back surface electric field strength increases causing premature breakdown during short circuits

Engineering Contradiction:
Improvebreakdown voltageVSAvoidback surface electric field strength
Core Design Contradiction:
StrengthVSStress or pressure

Solution Approach 1:

The back surface is divided into two regions with different hole concentrations. The first region (p+ collector layer) has a lower hole concentration optimized for breakdown voltage, while the second region (p+ back surface peripheral layer) has a higher hole concentration to reduce electric field strength at the periphery, preventing premature breakdown during short circuits.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The hole concentration is varied locally across the back surface - the p+ back surface peripheral layer has a higher hole concentration than the p+ collector layer. This local quality variation allows the peripheral region to handle high electric field conditions during short circuits while the central region maintains optimal breakdown characteristics.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The increased hole injection from the p+ back surface peripheral layer extends the time before breakdown during high voltage periods, including load short circuits, thereby improving the short-circuit capability of the semiconductor apparatus.

Implementation Method 1

a p+ back surface peripheral layer with a higher hole concentration than the p+ collector layer in the peripheral region, which injects additional holes into the n- drift region, reducing the back surface electric field strength

Methodology Applied
Scientific EffectHole injection: Holes

Data Source

PatentUS10727306B2Semiconductor apparatus
Publication Date: 2020.07.28 MITSUBISHI ELECTRIC CORP
  • US10727306B2 patent drawing
  • US10727306B2 patent drawing
  • US10727306B2 patent drawing

AI summary

A semiconductor apparatus includes a semiconductor substrate. Semiconductor substrate includes an active region and a peripheral region surrounding active region. Semiconductor substrate has a front surface and a back surface. A semiconductor device includes an n− drift region and a p+ collector layer. Peripheral region includes n− drift region and a p+ back surface peripheral layer. P+ back surface peripheral layer is provided on the back surface side of n− drift region. A first hole concentration in p+ back surface peripheral layer is higher than a second hole concentration in p+ collector layer. The short-circuit capability of semiconductor apparatus is improved.