Semiconductor Device Backside Conductive Pathways for Wire Bonding

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Solution Overview

Problem

The existing semiconductor device manufacturing process is complicated due to the opposite orientations of external connection terminals, which complicates the wire bonding process.

Innovation Solution

The semiconductor device design includes conductive portions that extend from the back surface of the second semiconductor substrate to reach the electrode pads on the first semiconductor substrate, allowing for simplified assembly by enabling wire bonding on the same side for both chips.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If wire bonding is performed for external connection terminals oriented in opposite directions, then electrical connection between chips is achieved, but the bonding process becomes complicated

Engineering Contradiction:
Improveelectrical connectionVSAvoidbonding process
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent applies asymmetry by orienting both external connection terminals in the same direction rather than in opposite directions. This asymmetric configuration simplifies the wire bonding process while maintaining electrical connection reliability between the first and second external connection terminals.

Inventive Principle:
Principle #4Asymmetry

Solution Approach 2:

The patent inverts the conventional approach by having both terminals face the same direction instead of opposite directions. This inversion of the terminal orientation arrangement simplifies the bonding process complexity while achieving the same electrical connection function.

Inventive Principle:
Principle #13The other way round (Inversion)

2Ease of manufacture

If conductive portions extend through the second semiconductor substrate to reach electrode pads, then assembly process is simplified, but manufacturing complexity increases

Engineering Contradiction:
Improveassembly processVSAvoidconductive portion structure
Core Design Contradiction:
Ease of manufactureVSDevice complexity

Solution Approach 1:

The conductive portions are formed in advance within the second semiconductor substrate during the chip fabrication process, before the stacking assembly. This preliminary formation of conductive pathways simplifies the subsequent assembly process, as the electrical connections are already prepared and aligned.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The conductive portions extend in the vertical dimension through the second semiconductor substrate, creating three-dimensional electrical pathways. This dimensional approach allows simplified planar assembly while managing the complexity through vertical integration during manufacturing.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Data Source

PatentUS10950543B2Semiconductor device and method of manufacturing the same
Publication Date: 2021.03.16 RENESAS ELECTRONICS CORP
  • US10950543B2 patent drawing
  • US10950543B2 patent drawing
  • US10950543B2 patent drawing

AI summary

The semiconductor device includes a first semiconductor substrate, a first wiring layer, a second wiring layer, a second semiconductor substrate, a first conductive portion, and a second conductive portion. The first wiring layer includes a first electrode pad and a first inductor electrically connected with each other. The second wiring layer includes a second inductor and a second electrode pad electrically connected with each other. The first conductive portion is formed in the second semiconductor substrate, the second wiring layer, and the first wiring layer so as to reach the first electrode pad from the back surface of the second semiconductor substrate. The second conductive portion is formed in the second semiconductor substrate and the second wiring layer so as to reach the second electrode pad from the back surface of the second semiconductor substrate. The first inductor and the second inductor are disposed so as to face each other.