Semiconductor Device Backside Wiring Infrared Reflection

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Solution Overview

Problem

Conventional BGA type semiconductor devices with light receiving elements face issues due to infrared rays passing through light transparent substrates and reflecting off wiring layers, causing patterns to be reflected in output images, leading to image blurring and improper packaging.

Innovation Solution

Incorporating an infrared ray absorbent material into the protection layer and optionally providing an additional infrared ray absorption layer, and strategically positioning the wiring and conductive terminals to avoid overlapping with the light receiving element, along with the use of a reflection layer to enhance image clarity and packaging balance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a wiring layer is formed on the back surface of the semiconductor substrate, then electrical connection is achieved, but infrared ray reflection causes pattern reflection on output images

Engineering Contradiction:
Improveelectrical connectionVSAvoidinfrared ray reflection
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

An infrared ray absorption layer is introduced as an intermediary between the wiring layer and the light receiving element. This layer selectively absorbs infrared rays while allowing visible light to pass through, thereby preventing infrared ray reflection that causes pattern reflection on output images without interfering with the electrical connection function of the wiring layer

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The infrared ray absorption layer is positioned specifically in the region overlapping the light receiving element on the back surface of the semiconductor substrate. This localized placement ensures that only the critical area affected by infrared reflection is treated, maintaining electrical connectivity in other regions while eliminating harmful reflections where needed

Inventive Principle:
Principle #3Local quality

2Illumination intensity

If a light transparent substrate is used, then light transmission is improved, but infrared rays pass through and reflect off the wiring layer

Engineering Contradiction:
Improvelight transmissionVSAvoidinfrared ray penetration
Core Design Contradiction:
Illumination intensityVSObject-affected harmful factors

Solution Approach 1:

The infrared ray absorption layer serves as a mediator between the light transparent substrate and the wiring layer. It allows visible light to transmit through to the light receiving element while absorbing infrared rays before they can reach the wiring layer and cause harmful reflections

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The infrared ray absorption layer changes the optical parameters of the substrate assembly by introducing selective wavelength absorption. It maintains high transmission for visible light wavelengths while introducing strong absorption for infrared wavelengths, effectively filtering the spectrum to prevent harmful reflections

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution effectively minimizes the impact of diffuse reflection, prevents pattern reflection on output images, and ensures proper packaging by absorbing or redirecting infrared rays, thereby enhancing image quality and reliability.

Implementation Method 1

an infrared ray absorbent material is mixed in the protection layer

Methodology Applied
Scientific EffectAbsorption (EM radiation): Absorption (EM radiation)

Data Source

PatentUS7633133B2Semiconductor device and manufacturing method of the same
Publication Date: 2009.12.15 SEMICON COMPONENTS IND LLC
  • US7633133B2 patent drawing
  • US7633133B2 patent drawing
  • US7633133B2 patent drawing

AI summary

This invention provides a semiconductor device that solves a problem that a pattern of a wiring formed on a back surface of a semiconductor substrate is reflected on an output image. A light receiving element (e.g. a CCD, an infrared ray sensor, a CMOS sensor, or an illumination sensor) is formed on a front surface of a semiconductor substrate, and a plurality of ball-shaped conductive terminals is disposed on a back surface of the semiconductor substrate. Each of the conductive terminals is electrically connected to a pad electrode on the front surface of the semiconductor substrate through a wiring layer. The wiring layer and the conductive terminal are formed on the back surface of the semiconductor substrate except in a region overlapping the light receiving element in a vertical direction, and are not disposed in a region overlapping the light receiving element.