Semiconductor Batch Processor Recipe Validation and Wafer Quantity Verification
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Solution Overview
Problem
Batch-type semiconductor processing apparatuses experience high process-related faults due to inadequate validation of received data and quantity verification, leading to incorrect recipe application and wafer processing errors.
Innovation Solution
A method for controlling semiconductor processing apparatuses that includes setting processing conditions, validating recipes, performing invariability checks, and verifying wafer quantities through lot mapping to ensure accurate and correlated data usage during the fabrication process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional control methods are used to halt operation when data is not correlated to data set, then potential process-related faults are prevented, but the method cannot adequately check whether received data is practicable for the semiconductor processing apparatus
Solution Approach 1:
The patent performs preliminary validation checks on received data before the semiconductor fabrication process begins. The control server validates whether the received recipe data exists in the recipe group and whether the wafer quantity matches before allowing the process to start, preventing faults by catching errors in advance rather than during processing.
Solution Approach 2:
The patent implements feedback mechanisms where the control server continuously monitors and validates data throughout the process. The invariability check process provides feedback to confirm that current recipe data remains correlated to the original set data, and the wafer quantity verification provides feedback to ensure data accuracy.
2Productivity
If batch-type semiconductor processing apparatus is used, then throughput is higher than plate-type apparatus, but process-related faults occur more frequently
Solution Approach 1:
The patent introduces a control server as an intermediary between the host computer and the batch-type semiconductor processing apparatus. The control server performs validation and verification functions, acting as a mediator that ensures data integrity and correctness before and during processing, thereby reducing faults while maintaining the high throughput capability of batch-type apparatus.
3Loss of time
If received data is used without validation against recipe group, then processing can start quickly, but the recipe may not lead to successful semiconductor fabrication process
Solution Approach 1:
The patent performs recipe validation as a preliminary action before the semiconductor fabrication process starts. The control server checks whether the received recipe data exists in the recipe group and is appropriate for the target apparatus, ensuring process success while minimizing time loss by performing checks efficiently before processing begins.
4Productivity
If wafer quantity is not verified through lot mapping, then processing proceeds without delays, but some wafers may be unloaded without undergoing fabrication or process may proceed with incorrect wafer quantity
Solution Approach 1:
The patent replaces manual or mechanical wafer counting methods with an automated electronic verification system. The control server performs lot mapping to electronically verify the wafer quantity, substituting physical counting with automated data verification, thereby maintaining processing efficiency while improving wafer processing accuracy.
Data Source
AI summary
A method for controlling a batch-type semiconductor processing apparatus is provided. The method checks whether a recipe set based on basic process information is within a recipe group stored in the semiconductor processing apparatus. The method also checks whether the quantity of wafers read through lot mapping is correlated to the quantity of wafers indicated by the basic process information. During the semiconductor fabrication process, the method also checks whether a current recipe of the semiconductor processing apparatus is correlated to the set recipe.