3D Semiconductor Heat Dissipation via Bonding Connectors

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Solution Overview

Problem

Conventional semiconductor devices with stacked chips face inefficiencies in heat dissipation due to the lack of separate heat radiation means, leading to performance deterioration as heat is not effectively discharged from the integrated package.

Innovation Solution

The semiconductor device incorporates dummy connectors and metal distribution lines for electrical coupling between chips, allowing heat generated from hot spots to be dissipated across the entire device, utilizing these internal connectors to efficiently distribute heat away from concentrated areas.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If chips are stacked using TSV, metal pad, and bump bonding to increase integration, then device performance is improved, but heat dissipation becomes insufficient leading to performance deterioration

Engineering Contradiction:
Improvedevice performanceVSAvoidheat dissipation
Core Design Contradiction:
ProductivityVSTemperature

Solution Approach 1:

The patent makes the bonding connectors serve dual functions: electrical coupling between chips and heat dissipation pathways. The same TSV, metal pad, and bump structures used for signal transmission are also utilized as thermal conduction paths, eliminating the need for separate heat dissipation components and resolving the contradiction between integration and heat management.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent combines the electrical connection function and thermal management function into a single integrated structure. The bonding connectors between chips simultaneously perform both electrical signal transmission and heat conduction, merging two previously separate functions into one unified system that addresses both performance and thermal issues.

Inventive Principle:
Principle #5Merging (Combining)

2Reliability

If wire bonding is used for electrical coupling between chips and substrate, then electrical connection is achieved, but additional space is required increasing chip package size

Engineering Contradiction:
Improveelectrical couplingVSAvoidchip package size
Core Design Contradiction:
ReliabilityVSArea of stationary object

Solution Approach 1:

The patent extracts the wire bonding function and replaces it with direct vertical connections through TSV and bump bonding. By removing the lateral wire routing requirement, the design eliminates the need for additional bonding space and large conductive circuit patterns on the substrate, significantly reducing the overall chip package area while maintaining electrical coupling reliability.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent transitions from lateral wire bonding (2D planar connection) to vertical through-silicon-via connections (3D stacked connection). This dimensional change allows electrical coupling to occur through the thickness of the chips rather than across the substrate plane, eliminating the need for large lateral bonding areas and reducing package size.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution effectively prevents performance deterioration by ensuring heat is efficiently discharged from the semiconductor device, improving heat dissipation characteristics and maintaining device performance.

Implementation Method 1

a heat generated from a hot spot of the semiconductor device is dissipated to an entire portion of the semiconductor device through the dummy metal distribution line and the dummy connector

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentUS9613881B2Semiconductor device having improved heat-dissipation characteristics
Publication Date: 2017.04.04 SK HYNIX INC
  • US9613881B2 patent drawing
  • US9613881B2 patent drawing
  • US9613881B2 patent drawing

AI summary

A semiconductor device having improved heat-dissipation characteristics is capable effectively discharging heat that is generated inside the semiconductor device of a three-dimensional laminated structure, to the outside of the semiconductor device by utilizing an internal connector used during bonding.