Semiconductor Die Buffer Material for Crack Prevention

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Solution Overview

Problem

As semiconductor devices are miniaturized and integrated into smaller volumes, challenges arise in bonding and operation due to differences in material properties such as Young's modulus and coefficient of thermal expansion, leading to issues like cracks and reduced reliability.

Innovation Solution

A buffer material with intermediate properties between the semiconductor die and underfill material is dispensed around the edges and corners of the semiconductor dies, acting as a buffer to mitigate thermal expansion differences and facilitate bonding, using a process that involves singulation and curing to ensure alignment and stability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If semiconductor devices are miniaturized to improve integration density, then more components can be integrated into a given volume, but cracks and reduced reliability occur due to differences in material properties

Engineering Contradiction:
Improveintegration densityVSAvoiddevice reliability
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

A buffer material with intermediate properties (Young's modulus and coefficient of thermal expansion) is introduced between the semiconductor die and underfill material. This intermediary layer mitigates the harmful effects of material property mismatches, preventing cracks while allowing continued miniaturization for high integration density.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The buffer material has deliberately selected intermediate physical parameters (Young's modulus and coefficient of thermal expansion) that are between those of the semiconductor die and underfill material. By changing the material parameters to intermediate values, the system resolves the contradiction between miniaturization benefits and reliability concerns.

Inventive Principle:
Principle #35Parameter changes

2Reliability

If buffer material is dispensed around the edges and corners of semiconductor dies to mitigate thermal expansion differences, then reliability is improved, but the manufacturing process complexity increases

Engineering Contradiction:
Improvebonding reliabilityVSAvoidmanufacturing process complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The buffer material is dispensed and cured on the semiconductor die before the underfill material is applied. This preliminary action ensures proper alignment and positioning, simplifying the subsequent underfill application process and improving bonding reliability without excessive complexity.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The buffer material is selectively dispensed around the edges and corners of the semiconductor die where thermal expansion stresses are most concentrated. This localized application addresses the critical stress points without requiring complete coverage, reducing manufacturing complexity while maintaining reliability improvements.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The buffer material effectively reduces the occurrence of cracks, enhancing the yield and reliability of semiconductor devices by bridging the thermal expansion gap between the semiconductor die and underfill, thereby improving the chip on wafer on substrate configuration.

Implementation Method 1

differences in material properties such as Young's modulus and coefficient of thermal expansion, leading to issues like cracks and reduced reliability

Methodology Applied
Scientific EffectThermal expansion: Thermal Expansion

Data Source

PatentUS11121050B2Method of manufacture of a semiconductor device
Publication Date: 2021.09.14 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US11121050B2 patent drawing
  • US11121050B2 patent drawing
  • US11121050B2 patent drawing

AI summary

In order to prevent cracks from occurring at the corners of semiconductor dies after the semiconductor dies have been bonded to other substrates, an opening is formed adjacent to the corners of the semiconductor dies, and the openings are filled and overfilled with a buffer material that has physical properties that are between the physical properties of the semiconductor die and an underfill material that is placed adjacent to the buffer material.