Semiconductor Byproduct Trap Module with Curved Plates
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Solution Overview
Problem
Conventional byproduct collecting apparatuses in semiconductor manufacturing processes face inefficiencies due to long turnaround times and frequent powder accumulation issues, leading to reduced operating rates and productivity, as reaction-byproducts take a long time to solidify and accumulate, and the narrow collection area requires frequent cleaning.
Innovation Solution
A byproduct collecting apparatus with a trap module featuring curved or inclined first plates, multi-step second plates, and a double cooling structure to rapidly cool and uniformly collect reaction-byproducts, extending the collection area and preventing powder lumps from entering the vacuum pump.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If a conventional powder trap unit with a narrow trap pipe is used, then reaction-byproducts are collected, but the collecting area is very narrow causing frequent powder accumulation and short cleaning periods
Solution Approach 1:
The trap pipe is divided into multiple sections with expansion joints, creating multiple collecting areas along the exhaust line. This segmentation allows reaction-byproducts to be collected at multiple locations simultaneously, effectively increasing the total collecting area without requiring a single large-diameter pipe.
Solution Approach 2:
The invention transitions from a single-dimensional narrow pipe to a multi-dimensional collecting structure by adding expansion joints that create lateral expansion. This dimensional change allows the trap to accommodate more reaction-byproducts across multiple sections, increasing the effective collecting area along the exhaust path.
2Quantity of substance
If reaction-byproducts are allowed to accumulate in the trap pipe, then collection is achieved, but it takes a long time for them to change into powder and accumulate, lengthening turnaround time
Solution Approach 1:
The expansion joints are pre-installed in the trap pipe at strategic locations to facilitate early condensation and accumulation of reaction-byproducts. This preliminary structural preparation ensures that byproducts begin to accumulate quickly upon entry, reducing the time required for the trap to reach its collection capacity and enabling faster cycle times.
Solution Approach 2:
The invention changes the physical parameters of the trap pipe by introducing expansion joints that alter the internal geometry and thermal characteristics. These parameter changes create favorable conditions for rapid condensation of reaction-byproducts, accelerating the transformation from gas to powder state and reducing accumulation time.
3Volume of moving object
If the trap pipe is made narrow to reduce space, then powder accumulates quickly, but the collecting area becomes very narrow requiring frequent removal of accumulated powder
Solution Approach 1:
The trap pipe is segmented into multiple sections with expansion joints, distributing the powder accumulation across multiple locations. This segmentation allows for easier and more frequent maintenance by enabling localized cleaning at each expansion joint section, reducing the overall maintenance burden compared to a single large accumulation zone.
Solution Approach 2:
The expansion joints create a dynamic collecting structure that can accommodate varying amounts of accumulated powder. The joints allow for flexible expansion and contraction, facilitating easier access for maintenance operations and reducing the frequency of complete powder removal while maintaining effective collection capacity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus efficiently collects reaction-byproducts by rapidly cooling them down and uniformly distributing their accumulation, extending the operation period and reducing the need for frequent replacements, thus improving productivity and preventing vacuum pump damage.
Implementation Method 1
a cooling member 170 for rapidly cooling down the exhaust gas
Implementation Method 2
the exhaust gas solidifies and changes into powder
Implementation Method 3
the reaction-byproducts change into powder and are accumulated in the trap pipe
Data Source
AI summary
Provided is a byproduct collecting apparatus for efficiently collecting reaction-byproducts contained in an exhaust gas exhausted from a process chamber during a semiconductor manufacturing process. The apparatus includes a housing and a trap module. The housing has a gas inlet port and a gas outlet port. The trap module is installed inside the housing and has first plates curved or inclined to guide an exhaust gas flow in a curved fashion.