Semiconductor Cell Layout With Variable Active Regions for Lower Power
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Solution Overview
Problem
The challenge of maintaining semiconductor device performance and reducing power consumption as sizes decrease is exacerbated by the need for 3D integration and advanced lithography, requiring innovative design approaches to enhance interconnectivity and reduce unnecessary power loss.
Innovation Solution
Incorporating active regions of varying sizes and utilizing a bottom isolation structure with a power fin to facilitate compact semiconductor layouts, along with transition cells to optimize cell placement and reduce spacing, while avoiding substrate doping and enhancing flexibility in design.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If semiconductor device size is reduced to maintain Moore's Law, then device density and integration are improved, but power consumption increases and performance maintenance becomes difficult
Solution Approach 1:
The patent applies local quality by implementing active regions with different widths within the same semiconductor device. Specifically, first active regions have a first width while second active regions have a second width that is different from the first width. This allows different portions of the device to be optimized for different functions: narrower active regions for lower power consumption areas and wider active regions for higher performance areas, thereby resolving the contradiction between device density and power consumption.
2Ease of manufacture
If uniform active region widths are used throughout the device, then manufacturing is simplified, but design flexibility and power optimization are reduced
Solution Approach 1:
The patent applies segmentation by dividing the active regions into multiple segments with different widths. The device contains first active regions with a first width and second active regions with a second width, allowing the active area to be segmented into functionally distinct zones. This segmentation enables independent optimization of different device portions for power efficiency versus performance while maintaining a relatively simple manufacturing process that only requires two distinct width specifications.
Data Source
AI summary
A semiconductor device includes a first cell in a first row, wherein the first row extends in a first direction, the first cell having a first cell height measured in a second direction perpendicular to the first direction. The semiconductor device further includes a second cell in the first row, wherein the second cell has a second cell height measured in the second direction, the second cell height is less than the first cell height. The second cell includes a first active region having a first width measured in the second direction, and a second active region having a second width measured in the second direction, wherein the second width is different from the first width.