Screwless Semiconductor Chamber Assembly Without Corroding Fasteners

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Solution Overview

Problem

Conventional semiconductor chamber component assembly using screws is prone to damage and corrosion, leading to unsatisfactory assembly and maintenance challenges.

Innovation Solution

The development of screwless semiconductor chambers that utilize interlocking contours and features, such as mortise joints and tenon tongues, to assemble components without screws, allowing for secure assembly via gravity and non-rigid adherence, with optional use of screws for specific parts.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If screws are used to assemble chamber components, then the assembly is secure and stable, but the components and screws are prone to damage and corrosion over time

Engineering Contradiction:

Improveassembly reliabilityVSAvoidcomponent service life

Core Design Contradiction:

ReliabilityVSDuration of action of stationary object

Solution Approach 1:

The patent removes screws entirely from the chamber assembly system, extracting the fastening function from traditional screw-based mechanical connections and replacing it with contour-based interlocking features that eliminate the corrosive and damage-prone screw components

Inventive Principle:

Principle #2Taking out (Extraction)

Solution Approach 2:

The invention replaces the screw-mechanical fastening system with a contour-based interlocking mechanism where complementary geometric features (convex protrusions and concave openings) create secure assembly through shape complementarity rather than threaded mechanical engagement

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

2Strength

If screws are used to assemble chamber components, then the components can be securely fastened, but the screws themselves become damaged and corrode requiring maintenance

Engineering Contradiction:

Improvefastening strengthVSAvoidmaintenance difficulty

Core Design Contradiction:

StrengthVSEase of repair

Solution Approach 1:

The chamber components are designed with self-assembling contour features that automatically provide secure fastening through their geometric complementarity, eliminating the need for separate fastening components like screws that require maintenance and repair

Inventive Principle:

Principle #25Self-service

3Reliability

If screwless assembly with interlocking contours is used, then damage and corrosion from screws are eliminated, but the assembly method complexity increases

Engineering Contradiction:

Improveassembly durabilityVSAvoidassembly structure complexity

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The patent merges the fastening function directly into the chamber component structures themselves through integrated contour features (convex protrusions and concave openings), combining the structural and fastening functions into unified components rather than separate elements

Inventive Principle:

Principle #5Merging (Combining)

Data Source

PatentUS12165909B2Screwless semiconductor processing chambers

Publication Date: 2024.12.10 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD

AI summary

In an embodiment, a system includes: a gas distributor assembly configured to dispense gas into a chamber; and a chuck assembly configured to secure a wafer within the chamber, wherein at least one of the gas distributor assembly and the chuck assembly includes: a first portion comprising a convex protrusion, and a second portion comprising a concave opening, wherein the convex protrusion is configured to engage the concave opening.