Semiconductor Chip Damage Detection via Interconnect Voltage Monitoring

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Solution Overview

Problem

Conventional semiconductor chip protection devices consume excessive power due to the current passing through diffusion resistors, and they fail to detect damage in metallic interconnect layers and dielectric layers, which are common areas of damage.

Innovation Solution

A semiconductor chip design incorporating a current source, a detection circuit, and active components connected in series, with conductive interconnects that allow precise current and voltage setting, enabling efficient power consumption and detecting damage in semiconductor chips, including cracks and corrosion at lateral edges.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a diffusion resistor is used to detect cracks in semiconductor zones, then crack detection capability is improved, but power consumption increases

Engineering Contradiction:
Improvecrack detection capabilityVSAvoidpower consumption
Core Design Contradiction:
ReliabilityVSUse of energy by moving object

Solution Approach 1:

The patent extracts the detection function from the semiconductor zone itself and places it in the metallic interconnect layer. By monitoring voltage changes in the interconnect layer rather than using diffusion resistors in the semiconductor zones, the system achieves crack detection without the high power consumption associated with resistor-based methods.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent introduces the metallic interconnect layer as an intermediary element for detection. Instead of directly monitoring semiconductor zones with power-consuming resistors, the interconnect layer serves as a mediator that exhibits detectable voltage changes when cracks occur, enabling low-power monitoring.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Reliability

If diffusion resistors are used for protection, then crack detection in semiconductor zones is enabled, but damage detection in metallic interconnect layers and dielectric layers is not achieved

Engineering Contradiction:
Improvesemiconductor zone protectionVSAvoiddamage detection coverage
Core Design Contradiction:
ReliabilityVSAdaptability or versatility

Solution Approach 1:

The patent makes the metallic interconnect layer serve multiple functions: it acts as both the structural interconnect element and the detection element. This universal approach allows the same layer to provide electrical connectivity while simultaneously enabling detection of cracks in the interconnect layer, dielectric layers, and semiconductor zones, thus achieving comprehensive damage detection coverage.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Device complexity

If conventional protection devices are used, then simple crack detection is achieved, but precise current and voltage management is not possible

Engineering Contradiction:
Improveprotection device simplicityVSAvoidcurrent and voltage detection precision
Core Design Contradiction:
Device complexityVSMeasurement precision

Solution Approach 1:

The patent replaces the mechanical/resistive detection method with an electrical field-based detection method. By monitoring voltage changes in the metallic interconnect layer caused by crack-induced resistance changes, the system achieves precise current and voltage management and detection without requiring complex resistor networks or mechanical sensing elements.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design reduces power consumption while effectively detecting damage in semiconductor chips, including cracks and corrosion, and can be integrated with existing components, such as temperature sensors, to provide reliable fault messaging and minimize additional circuitry and wiring.

Implementation Method 1

a current source coupled between a first potential and an electrical node, a detection circuit having an input coupled to the electrical node

Methodology Applied
Scientific EffectElectrical current flow: Conduction (electrical)

Implementation Method 2

A current flow may thereby arise from the first potential through the current source and through the active component to the second potential. The connection node may be coupled to an input of the detection circuit. The detection circuit may detect damage in the semiconductor chip on the basis of the potential of the connection node

Methodology Applied
Scientific EffectVoltage detection: Electric Field

Data Source

PatentUS9378317B2Method for detecting damage to a semiconductor chip
Publication Date: 2016.06.28 INFINEON TECHNOLOGIES AG
  • US9378317B2 patent drawing
  • US9378317B2 patent drawing
  • US9378317B2 patent drawing

AI summary

A semiconductor chip having a current source coupled between a first potential and an electrical node, a detection circuit having an input coupled to the electrical node, and a first active component coupled in series with the current source and further coupled between the electrical node and a second potential, wherein the first active component is coupled to the electrical node via a first conductive interconnect.