System and method for operating the same
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Solution Overview
Problem
Current semiconductor manufacturing processes lack an effective method for precisely and sufficiently removing residues, posing a critical challenge in the field.
Innovation Solution
A system comprising a cleaning device with a tank, pipe, pump, heater, filter, and a concentration measuring device with a cooler and concentration meter, which uses a liquid to remove residues and measures its concentration efficiently, optimizing temperature and flow rates to enhance residue removal and measurement precision.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional residue removal methods are used, then the process is simple, but the residue removal precision and sufficiency are insufficient
Solution Approach 1:
The system divides the residue removal process into distinct functional modules: a cleaning device with tank and pump for liquid circulation, a measurement device with cooler and concentration meter for monitoring, and a control device for coordination. This segmentation allows each module to be optimized independently while achieving high overall precision.
Solution Approach 2:
The concentration meter continuously measures the residue concentration in the liquid, providing real-time feedback to the control device. The control device adjusts the cleaning process parameters based on this feedback, enabling precise control of residue removal and ensuring high manufacturing precision through closed-loop control.
2Measurement precision
If the liquid is cooled slowly to precise temperature, then measurement accuracy is improved, but the processing time increases significantly
Solution Approach 1:
The cooler is activated before the concentration measurement is performed to pre-cool the liquid to the required temperature. This preliminary cooling action ensures that when measurement occurs, the liquid is already at the optimal temperature for accurate measurement, eliminating the need for time-consuming cooling during the measurement process itself.
Solution Approach 2:
The system changes the temperature parameter of the liquid by using the cooler to reduce it from a higher initial temperature to a precise measurement temperature. This parameter change enables accurate concentration measurement while the control device manages the timing to minimize overall processing time.
3Productivity
If the liquid flow rate is increased to improve cleaning efficiency, then productivity is improved, but measurement precision deteriorates
Solution Approach 1:
The control device dynamically adjusts the liquid flow rate based on the operational phase: during cleaning operations, the flow rate is increased to maximize cleaning efficiency and productivity; during measurement operations, the flow rate is reduced to ensure accurate concentration readings. This dynamic adjustment resolves the contradiction between productivity and measurement precision.
Solution Approach 2:
The system operates in periodic cycles alternating between cleaning mode (high flow rate for productivity) and measurement mode (low flow rate for precision). The control device coordinates these periodic transitions, allowing the system to achieve both high overall productivity through efficient cleaning cycles and accurate measurements during dedicated measurement intervals.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively removes semiconductor residues and measures concentration accurately, improving efficiency compared to prior methods by cooling the liquid to a precise temperature within minutes, rather than hours, ensuring precise measurement and residue removal without damaging the semiconductor device.
Implementation Method 1
the cooler (220) is configured to cool the first liquid conveyed by the tube (210)
Implementation Method 2
the heater (140) is configured to heat the first liquid (500) to a first temperature to remove residues of a semiconductor device (600)
Implementation Method 3
the pump (130) is configured to move the first liquid (500) in the pipe (120)
Data Source
AI summary
A system is disclosed herein. The system includes a tank, a tube, a cooler, and a concentration meter. The tank is configured to contain first liquid. The tube is coupled to the tank and configured to convey the first liquid from the tank. The cooler covers the tube to cool the first liquid conveyed by the tube. The concentration meter is configured to measure a concentration of the first liquid cooled by the cooler.