In-Situ Consumable Part Replacement in Semiconductor Cluster Tools
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Solution Overview
Problem
The existing process of replacing consumable parts in semiconductor wafer manufacturing cluster tool assemblies requires breaking vacuum, leading to time-consuming and costly downtime, as well as risks of contamination and hardware damage.
Innovation Solution
A cluster tool assembly design that allows for the removal and replacement of consumable parts without breaking vacuum, using a replacement station and lift mechanism to access and exchange parts while maintaining the process module in a vacuum state, utilizing robots and isolation valves to minimize exposure to atmospheric conditions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of repair
If the cluster tool assembly is opened to replace consumable parts, then the damaged part can be accessed and replaced, but the vacuum state is broken causing contamination risk and extended downtime
Solution Approach 1:
The cluster tool assembly is divided into separate vacuum chambers (process modules) that can be independently accessed. The replacement station is integrated as a separate module that couples to the vacuum chamber, allowing consumable parts to be replaced without breaking the vacuum seal of the main processing area. This segmentation enables localized maintenance while preserving the overall vacuum environment.
Solution Approach 2:
A replacement station acts as an intermediary mechanism between the external environment and the vacuum chamber. This station includes a robot and lift mechanism that can access consumable parts through a sealed interface, transferring parts without exposing the vacuum chamber to atmospheric conditions. The intermediary maintains the vacuum barrier while enabling part replacement.
2Ease of repair
If the cluster tool assembly is taken offline for part replacement, then consumable parts can be replaced, but productivity and operational efficiency decrease
Solution Approach 1:
The system incorporates automated robots and lift mechanisms that perform consumable part replacement without requiring external technician intervention. The robot can autonomously navigate to the consumable part, retrieve it using the lift mechanism, and replace it with a new part, all while the system remains in vacuum. This self-service capability eliminates downtime associated with manual replacement procedures.
Solution Approach 2:
The vacuum chamber maintains its vacuum state continuously during part replacement, allowing the system to remain in an operational state. The replacement station operates within the vacuum environment, enabling seamless part exchange without interrupting the overall process flow or requiring system shutdown. This continuity preserves productivity by avoiding complete system offline periods.
3Ease of repair
If manual technician intervention is used for part replacement, then consumable parts can be replaced, but the process becomes time-consuming and complex
Solution Approach 1:
Manual mechanical operations by technicians are replaced with an automated robot system. The robot, controlled by a controller, performs all operations including navigating to the consumable part, coordinating with the lift mechanism for retrieval and installation, and managing the replacement process. This substitution of manual mechanics with automated robotic mechanics dramatically reduces replacement time and eliminates the need for technician intervention.
Solution Approach 2:
The system transitions from manual operation parameters (technician skill, manual dexterity) to automated control parameters (robotic positioning accuracy, controller coordination). The replacement process is transformed from a time-intensive manual procedure to a rapid automated sequence, changing the operational parameters from human-paced to machine-paced speeds, thereby reducing overall replacement time.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach significantly reduces the time and risk associated with replacing consumable parts, maintaining the vacuum state, and minimizing contamination and hardware damage, thereby enhancing operational efficiency and reducing downtime.
Implementation Method 1
The lift mechanism is configured to move the consumable part to a raised position so that a robot may access and retrieve the consumable part
Implementation Method 2
A robot is used to retrieve a used consumable part from the process module and replace with a new consumable part
Implementation Method 3
The process module is maintained in a vacuum state, so as to allow replacement of the consumable part
Data Source
AI summary
A cluster tool assembly includes a vacuum transfer module, a process module having a first side connected to the vacuum transfer module. An isolation valve having a first side and a second side, the first side of the isolation valve coupled to a second side of the process module. A replacement station is coupled to the second side of the isolation valve. The replacement station includes an exchange handler and a part buffer. The part buffer includes a plurality of compartments to hold new or used consumable parts. The process module includes a lift mechanism to enable placement of a consumable part installed in the process module to a raised position. The raised position provides access to the exchange handler to enable removal of the consumable part from the process module and store in a compartment of the part buffer. The exchange handler of the replacement station is configured to provide a replacement for the consumable part from the part buffer back to the process module. The lift mechanism is configured to receive the consumable part provided for replacement by the exchange handler and lower the consumable part to an installed position. The replacement by the exchange handler and the process module is conducted while the process module and the replacement station are maintained in a vacuum state.