Semiconductor Coating Tester Using Gas Sensors

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Solution Overview

Problem

Semiconductor chamber components with defective coatings experience short service life, severe corrosion, and contamination due to poor coating quality, leading to high costs and processing defects in the semiconductor industry.

Innovation Solution

A system and method for testing semiconductor chamber component coatings using a test station with a hollow tube and sensor to detect gaseous byproducts from a reaction between a reagent and the underlying base layer, providing a quantitative measure of coating layer failures and qualitative verification of defects.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a coating layer is applied to semiconductor chamber components to provide corrosion resistance and plasma resistance, then the service life and performance are improved, but the coating may develop defects that lead to severe corrosion and contamination when it fails

Engineering Contradiction:

Improvecoating durabilityVSAvoidcorrosion and contamination

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The test station performs preliminary testing of the coating layer before the component is used in semiconductor processing. A reagent is applied to the coating layer to detect potential defects early, allowing defective coatings to be identified and replaced before they can cause corrosion or contamination during actual use.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

A reagent acts as an intermediary substance to test the coating layer's integrity. The reagent reacts with the coating layer or penetrates through defects to reach the base layer, providing indirect detection of coating quality without directly causing the corrosion or contamination that would occur during normal operation.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Measurement precision

If traditional coating testing methods are used, then the testing process is simple, but the detection precision and ability to identify coating defects is insufficient

Engineering Contradiction:

Improvecoating defect detection accuracyVSAvoidtesting system complexity

Core Design Contradiction:

Measurement precisionVSDevice complexity

Solution Approach 1:

The test station replaces simple visual inspection or manual testing methods with an automated system that uses sensors to detect gaseous byproducts. This substitution of mechanical/manual processes with sensor-based detection significantly improves measurement precision while managing system complexity through automation.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The sensor provides real-time feedback by detecting gaseous byproducts generated during the reagent-coating reaction. This feedback mechanism enables precise detection of coating defects, as the sensor signal directly indicates the presence or absence of defects based on the chemical reaction occurring at the coating interface.

Inventive Principle:

Principle #23Feedback

3Productivity

If manual coating inspection methods are used, then the equipment cost is low, but the productivity and efficiency of coating quality assurance is reduced

Engineering Contradiction:

Improvecoating testing efficiencyVSAvoidtesting apparatus complexity

Core Design Contradiction:

ProductivityVSDevice complexity

Solution Approach 1:

The coating layer itself participates in the testing process by reacting with the applied reagent to generate detectable gaseous byproducts. This self-service approach allows the coating to reveal its own defects through the chemical reaction, eliminating the need for complex external testing equipment while maintaining high productivity through rapid, automated detection.

Inventive Principle:

Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system effectively determines coating layer exposure and defects, optimizing coating quality to meet specifications, reducing corrosion, contamination, and extending the service life of semiconductor chamber components.

Implementation Method 1

a reaction between a reagent disposed in the hollow tube and a base layer of the semiconductor chamber component disposed under the coating layer

Methodology Applied

Scientific EffectChemical reaction: Chemical Bonding

Implementation Method 2

The sensor is configured to detect the presence of a gaseous byproduct of a reaction

Methodology Applied

Scientific EffectGas detection:

Data Source

PatentUS10883972B2Coating tester using gas sensors

Publication Date: 2021.01.05 APPLIED MATERIALS INC

AI summary

Embodiments of the disclosure generally relate to a system, apparatus and method for testing a coating over a semiconductor chamber component. In one embodiment, a test station comprises a hollow tube, a sensor coupled to a top end of the tube and a processing system communicatively coupled to the sensor. The hollow tube has an open bottom end configured for sealingly engaging a coating layer of the semiconductor chamber component. The sensor is configured to detect the presence of a gaseous byproduct of a reaction between a reagent disposed in the hollow tube and a base layer disposed under the coating layer. The processing system is configured to determine exposure of the base layer through the coating layer in response to information about the presence of the gaseous byproduct. In another embodiment, the processing system is communicatively coupled to each sensor of a plurality of test stations.