Semiconductor By-Product Collection Tower for Compact Multi-Stage Exhaust Flow
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing semiconductor manufacturing by-product collection apparatuses with small capacities face inefficiencies due to stagnation of exhaust gas flow, leading to reduced collection efficiency and potential contamination risks, despite having unused collection space.
Innovation Solution
A multi-stage collection apparatus with an internal tower structure comprising an upper-end, intermediate, and lower-end collection part, utilizing heaters and varying horizontal collection plates with different gas holes and arrangements to guide and regulate exhaust gas flow, maximizing collection space utilization and minimizing discharge.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If exhaust gas flow is not properly guided in small-capacity collection apparatus, then collection space is underutilized, but exhaust gas stagnation occurs leading to reduced collection efficiency
Solution Approach 1:
The collection apparatus is divided into multiple collection parts (first, second, third collection parts) with different horizontal collection plates arranged at different heights. Each collection part has specifically designed gas holes and plate arrangements to guide exhaust gas flow through different paths, preventing stagnation and maximizing space utilization in the limited collection volume.
Solution Approach 2:
The patent introduces vertical dimension variations by arranging horizontal collection plates at different heights (first, second, third collection parts) and designing varying gas hole patterns at each level. This multi-level arrangement creates three-dimensional gas flow paths that enhance collection efficiency without increasing the overall footprint of the apparatus.
2Quantity of substance
If collection apparatus capacity is increased to improve collection efficiency, then more by-products can be collected, but device size and installation space requirements increase
Solution Approach 1:
Multiple collection parts are nested vertically within a compact structure, with first, second, and third collection parts arranged at different heights. This nested arrangement allows the apparatus to achieve increased by-product collection capacity while maintaining a compact overall volume suitable for installation in limited spaces such as clean rooms.
Solution Approach 2:
The patent transitions from a single-level collection structure to a multi-level vertical arrangement, utilizing the vertical dimension to increase collection capacity. By stacking collection parts at different heights with optimized gas hole patterns, the apparatus achieves higher by-product collection capacity without proportionally increasing the horizontal footprint.
3Duration of action of moving object
If exhaust gas is discharged quickly to maintain flow, then collection apparatus size can be reduced, but residence time decreases leading to incomplete by-product collection
Solution Approach 1:
The collection path is segmented into multiple stages with first, second, and third collection parts, each containing horizontal collection plates with different gas hole arrangements. This segmentation creates a multi-stage gas flow path that extends the residence time of exhaust gas within the collection apparatus while maintaining a compact overall volume through efficient spatial arrangement.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances collection efficiency by prolonging residence time of exhaust gases, reducing discharge of unprocessed gases, and ensuring effective use of limited space, thereby increasing the usage cycle and reducing contamination risks.
Implementation Method 1
heats and distributes the exhaust gas with a heater
Data Source
AI summary
The present disclosure relates to an apparatus for collecting by-products for a semiconductor manufacturing process with improved collection space efficiency, and an object of the present disclosure is to provide an apparatus for collecting by-products, which provides a multi-stage collection function while guiding a flow of exhaust gas through an internal collection tower, which includes an upper-end collection part, an intermediate collection part, and a lower-end collection part by guiding the exhaust gas to a lower side through a peripheral portion after heating the exhaust gas, which is introduced into the collection apparatus, by using a heater, and allows main by-products to be accumulated in an internal space of the intermediate collection part having open gas flow structures of an inner region and an inner wall housing, thereby improving efficiency of a collection space.