Semiconductor Component Recoating After Parasitic Deposit Removal

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Solution Overview

Problem

Semiconductor processing components accumulate parasitic coatings that distort components and alter critical dimensions, necessitating their removal to restore functionality and extend their lifespan.

Innovation Solution

A refurbishment process involving surface preparation to remove parasitic coatings and apply a new protective coating, ensuring compatibility and continuity with the original coating, thereby restoring the component's original properties.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If the semiconductor processing component is used continuously, then productivity is improved, but parasitic coatings accumulate on the component surface, altering critical dimensions and distorting the component

Engineering Contradiction:

Improvecontinuous usageVSAvoidcritical dimensions

Core Design Contradiction:

ProductivityVSManufacturing precision

Solution Approach 1:

The patent applies preliminary action by performing surface preparation (cleaning and roughening) and restorative coating before the parasitic coatings cause significant distortion or dimensional changes. This preventive maintenance approach removes accumulated parasitic coatings and applies a new protective coating that mimics the original, restoring the component to near-original condition and enabling continued use without affecting critical dimensions

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The patent changes the physical and chemical parameters of the component surface through surface preparation processes (cleaning to remove contaminants, roughening to increase surface area and adhesion) and restorative coating (applying new material with controlled thickness and properties). These parameter changes restore the surface characteristics to match the original protective coating, eliminating the harmful effects of parasitic coating accumulation

Inventive Principle:

Principle #35Parameter changes

2Manufacturing precision

If parasitic coatings are removed to restore critical dimensions, then manufacturing precision is improved, but the component requires downtime for refurbishment

Engineering Contradiction:

Improvecritical dimensionsVSAvoidrefurbishment downtime

Core Design Contradiction:

Manufacturing precisionVSLoss of time

Solution Approach 1:

The refurbishment process is segmented into distinct, optimized stages: surface preparation (cleaning and roughening) followed by restorative coating. This segmentation allows each step to be performed efficiently with appropriate parameters, minimizing total refurbishment time while ensuring critical dimensions are restored. The systematic approach prevents rework and ensures quality outcomes

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The patent applies discarding and recovering by removing the degraded parasitic coatings and applying a fresh restorative coating that recovers the original protective functions. This renewal process restores the component to serviceable condition, extending its lifecycle and maintaining manufacturing precision without requiring replacement of the entire component

Inventive Principle:

Principle #34Discarding and recovering

3Ease of manufacture

If a new protective coating is applied over the original protective coating without surface preparation, then the coating application is simplified, but adhesion is poor and interfaces/discontinuities are created

Engineering Contradiction:

Improvecoating applicationVSAvoidcoating adhesion

Core Design Contradiction:

Ease of manufactureVSReliability

Solution Approach 1:

Preliminary surface preparation is performed before applying the restorative coating, including cleaning to remove contaminants and roughening to increase surface area and create mechanical interlocking features. This preliminary action ensures strong adhesion between the new coating and the substrate, eliminating interface discontinuities and creating a reliable, homogeneous coating structure

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The surface preparation process creates local quality variations on the substrate surface through controlled roughening, creating areas with enhanced adhesion properties. The restorative coating then bonds preferentially to these prepared surfaces, ensuring uniform and strong adhesion across the entire component surface while maintaining ease of application

Inventive Principle:

Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The process extends the component's lifetime, reduces user costs, and maintains the component's functionality by applying a new protective coating that adheres well to the cleaned surface, eliminating interfaces and discontinuities.

Implementation Method 1

surface roughening

Methodology Applied

Scientific EffectAbrasion: Abrasion

Implementation Method 2

The new protective coating is applied via a restorative coating operation

Methodology Applied

Scientific EffectVapor deposition: Physical Vapour Deposition

Data Source

PatentUS20260068599A1Protective coating for a used semiconductor processing component

Publication Date: 2026.03.05 MOMENTIVE PERFORMANCE MATERIALS QUARTZ INC

AI summary

A refurbishment method is provided to restore and protect a semiconductor processing component used in a semiconductor reactor. The method includes removing parasitic deposits from a semiconductor processing component accumulated from the semiconductor reactor. A new protective coating is then applied to the semiconductor processing component.