Semiconductor Control Host Integrating Analog and Digital Modules
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Solution Overview
Problem
The complexity of wiring and the inability to achieve precise control of mechanical arms in semiconductor machine systems due to the need for multiple interface cards and complicated connections with external sensing modules hinder efficient processing and feedback in semiconductor manufacturing.
Innovation Solution
A semiconductor machine system with a control host comprising a main control module, an analog control module, and a digital control module, coupled via serial interfaces, which reduces wiring complexity and enables precise control of mechanical arms using a servo motor-driven mechanical arm with real-time feedback, along with RF plasma and gas control units for processing operations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple interface cards are used to connect sensing modules and control machines, then the machine can interface with more external devices, but the wiring complexity increases significantly
Solution Approach 1:
The patent combines multiple interface cards (analog interface card and digital interface card) into a single integrated interface card that can handle both analog and digital signals. This merging reduces the number of separate components and simplifies the wiring structure while maintaining the ability to connect to multiple external devices.
Solution Approach 2:
The interface card is designed with multi-functional capabilities, incorporating both analog-to-digital conversion functions and digital signal processing functions within a single card. This universal design allows one card to perform the roles that previously required multiple separate cards, thereby reducing wiring complexity.
2Adaptability or versatility
If multiple interface cards are used for external connections, then more sensing modules can be connected, but the overall machine size increases
Solution Approach 1:
Multiple interface cards are merged into a single integrated interface card that consolidates analog and digital processing capabilities. This reduction in the number of physical cards directly decreases the space required in the control system, thereby reducing the overall machine size.
Solution Approach 2:
The interface card design embeds multiple functional units within a single card structure, where analog-to-digital conversion modules and digital signal processing modules are nested within the same physical carrier. This nesting approach maximizes functional density while minimizing physical footprint.
3Device complexity
If traditional wiring connections are used between control machine and mechanical arm, then the structure is simple, but feedback precision is insufficient for precise control
Solution Approach 1:
The patent replaces traditional mechanical wiring connections with an electronic signal processing system that includes analog-to-digital conversion and digital signal processing. This substitution enables precise feedback by converting analog sensor signals into digital format for accurate processing, thereby improving measurement precision while maintaining structural simplicity through integrated electronics.
Solution Approach 2:
The control system incorporates a feedback mechanism where sensors detect the position and state of the mechanical arm, convert these signals through analog-to-digital conversion, and feed the digital feedback back to the control unit. This closed-loop feedback enables precise control by continuously monitoring and adjusting the mechanical arm's position based on accurate measurement data.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration simplifies the control structure, reduces system size, and enhances precision and reliability in semiconductor processing by eliminating the need for multiple interface cards and improving feedback mechanisms, thereby increasing processing efficiency and reducing errors.
Implementation Method 1
a RF plasma unit, which comprises a plasma generator and a control circuit
Implementation Method 2
RF plasma unit
Implementation Method 3
a gas control unit, which comprises a solenoid valve, a flow valve, and a barometer
Data Source
AI summary
A semiconductor machine system comprises a plurality of working chambers, wherein the working chambers process materials separately; a control host coupled to the plurality of working chambers, comprising: a main control module coupled to the plurality of working chambers; an analog control module coupled to the plurality of working chambers, and the analog control module is detachably coupled to one or more external devices by serial interface coupling; a digital control module coupled to the plurality of working chambers, and the main control module, the analog control module and the digital control module are coupled to each other; and a plurality of operating units coupled to at least one of the main control module, the analog control module and the digital control module, respectively, to control the plurality of working chambers for processing the materials by the main control module, the analog control module and the digital control module.