Semiconductor Equipment Control Host Automation via Image-Triggered Macros
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Solution Overview
Problem
In semiconductor production facilities, managing multiple pieces of processing equipment requires significant manpower and time for routine operations, leading to high costs and inefficiencies, especially in environments that need precise control of temperature, humidity, and dust levels.
Innovation Solution
A semiconductor equipment management method that uses a management host connected to control hosts via a switch device, allowing for remote and automated control of multiple pieces of equipment through a user-friendly macro editing interface, enabling bi-directional signal transmission and reducing the need for manual intervention.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If multiple pieces of processing equipment are installed to achieve higher production capacity, then productivity increases, but the manpower and time required for routine management operations increases
Solution Approach 1:
The patent merges control of multiple processing equipment into a single integrated management system. The management host consolidates control over numerous equipment units, allowing centralized monitoring and operation. This combining approach enables one operator to manage multiple equipment simultaneously, dramatically reducing the time and manpower needed for routine management while maintaining high production capacity
Solution Approach 2:
The management host acts as an intermediary between operators and multiple processing equipment. It provides a unified interface that mediates control signals and data flow between the operator and numerous equipment units. This intermediary layer simplifies the complexity of managing multiple equipment, allowing efficient oversight without requiring direct interaction with each individual unit
2Productivity
If multiple pieces of processing equipment are installed to achieve higher production capacity, then productivity increases, but management complexity increases
Solution Approach 1:
The management host is designed with universal functionality to handle diverse processing equipment through a single platform. It provides multi-functional capabilities including monitoring, control, alarm management, and data collection across different equipment types. This universality reduces management complexity by eliminating the need for separate management systems for each equipment unit
Solution Approach 2:
The management system segments complex equipment control into modular functional components. Each processing equipment is managed through standardized functional modules that can be independently configured and controlled. This segmentation allows the management host to handle multiple equipment units through reusable control patterns, reducing overall system complexity
3Ease of operation
If manual management operations are performed on each processing equipment, then ease of operation is maintained, but loss of time and manpower increases
Solution Approach 1:
The management host enables self-service operation where routine management tasks are automatically performed without continuous manual intervention. The system autonomously monitors equipment status, detects anomalies, and executes predefined control sequences. This self-service capability maintains operational simplicity while dramatically reducing the time and effort required for routine management
Data Source
AI summary
A semiconductor equipment management method applicable to an electronic device for managing multiple pieces of semiconductor equipment is provided. The pieces of semiconductor equipment are respectively controlled through multiple control hosts, and the control hosts and the electronic device are connected to a switch device. The method includes: receiving real-time image information of each control host through the switch device; determining whether the real-time image information of each control host includes a triggering event by performing an image recognition on the real-time image information; executing a macro corresponding to the triggering event, where the macro includes at least one self-defined operation; generating at least one input command according to the self-defined operation of the executed macro; and controlling the control hosts to execute the self-defined operation of the executed macro by transmitting the input command to the control hosts through the switch device.