Semiconductor Controller Backup via Server Communication
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Solution Overview
Problem
Current semiconductor manufacturing systems lack an efficient method for creating and managing backup files for semiconductor manufacturing apparatus controllers, which can lead to prolonged downtime and production disruptions if the storage device is damaged.
Innovation Solution
A semiconductor manufacturing system with a controller and server configuration that enables bidirectional communication for creating, requesting, and acquiring backup files, allowing the server to manage and store backup data independently of the apparatus controller's storage device.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If backup files are manually managed by operators, then operator awareness of backup timing is required, but this increases operational complexity and risk of human error
Solution Approach 1:
The system enables automatic backup file creation and management through the controller's own processing unit, eliminating the need for operator intervention. The controller autonomously creates backup files of its internal storage data and transfers them to external storage devices, making the system self-sufficient for backup operations.
Solution Approach 2:
The system performs backup file creation as a preliminary action before potential storage device failures occur. By continuously or periodically creating backup files in advance, the system ensures that restoration can be immediately performed if the main storage device fails, improving reliability without requiring operator awareness at the moment of failure.
2Reliability
If backup files are created and stored locally in the controller, then data is preserved, but storage space is consumed and restoration time increases
Solution Approach 1:
The system extracts backup files from the controller's internal storage device and transfers them to an external storage device. This separation allows the controller to maintain minimal local backup storage while storing comprehensive backup data externally, reducing the controller's storage burden and enabling faster restoration through external access.
Solution Approach 2:
The system introduces an external storage device as an intermediary between the controller and backup data. This intermediary serves as a dedicated backup repository that can be accessed for restoration without burdening the controller's internal storage, thereby reducing restoration time while ensuring data preservation.
3Ease of repair
If the storage device of the control device is damaged, then data loss occurs, but with proper backup management restoration can be achieved
Solution Approach 1:
The system creates exact copies of the controller's internal storage data as backup files and stores them in an external storage device. These copies enable complete restoration of the controller's data and settings without requiring complex manual reconstruction procedures, thereby simplifying the repair process while ensuring data preservation.
4Extent of automation
If automatic backup processes are implemented, then operator intervention is eliminated, but communication infrastructure is required
Solution Approach 1:
The controller's processing unit performs multiple functions: it manages both the semiconductor manufacturing process control and the automatic backup file creation and transfer processes. This multi-functionality eliminates the need for separate dedicated backup hardware while achieving full automation, as the existing communication infrastructure of the controller is utilized for backup operations.
Data Source
AI summary
A semiconductor manufacturing system according to an embodiment includes: a controller configured to control a semiconductor manufacturing apparatus; and a server configured to bidirectionally communicate with the controller via a communication line. The server includes a first processor configured to: transmit a backup file creation request (signal) that sets data specific to each controller as a backup file and transmit a backup file acquisition request (signal) requesting acquisition of the created backup file; and receive the created backup file. The controller includes a second processor configured to: receive a request (signal) from the server; and create the backup file when receiving the backup file creation request (signal).