Semiconductor Core Module Layout for Flexible Clean Handling
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Solution Overview
Problem
Semiconductor production facilities face limitations in flexibility and space utilization due to the fixed design of machines and devices along a transport line, which restricts the ability to adapt to varying functionalities and prevent efficient handling of sensitive objects.
Innovation Solution
A modular core module system comprising a handler, supply unit, and control unit with interchangeable interface frames that can be expanded or reduced to accommodate different functionalities, ensuring a gas-tight environment and efficient handling of objects through a uniaxial track and robotic manipulators, while providing laminar flow for purging gases to prevent contamination.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If machines and devices are designed to fit into a predefined allotted space along the transport line, then the space utilization along the transport line is improved, but the flexibility to adapt to varying functionalities deteriorates
Solution Approach 1:
The machine is divided into multiple functional modules (first functional module, second functional module, etc.) that can be independently attached or detached from the common carrier along the transport line. This segmentation allows the system to be configured with different combinations of functionalities while maintaining a compact footprint along the transport line, thus resolving the contradiction between space utilization and adaptability.
Solution Approach 2:
The system transitions from a fixed, static configuration to a dynamic, reconfigurable arrangement where functional modules can be attached or detached from the common carrier. This dynamic capability enables the machine to adapt its functionalities according to varying production requirements while maintaining efficient space utilization along the transport line.
2Area of stationary object
If machines are designed to take up minimal space adjacent to the transport line, then the space efficiency along the transport line is improved, but the functionality and operational capabilities deteriorate
Solution Approach 1:
The functional modules are arranged perpendicular to the transport line direction, extending in the vertical or lateral dimensions rather than along the transport line. This dimensional reconfiguration allows the machine to provide extensive functionalities while maintaining minimal space occupation along the transport line, thus resolving the contradiction between space efficiency and functionality.
3Device complexity
If the core module is designed with fixed functionality, then the manufacturing and operation simplicity is improved, but the adaptability to varying production requirements deteriorates
Solution Approach 1:
The common carrier is designed as a universal platform that can accommodate multiple different functional modules through standardized attachment mechanisms. This universality allows a single core module structure to provide multiple functionalities by simply changing the attached modules, thus resolving the contradiction between simplicity and adaptability without increasing overall system complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This modular system enhances flexibility and efficiency in semiconductor production by allowing tailored functionality configurations, minimizing spatial footprint, and maintaining a clean environment, thus optimizing handling and storage processes for sensitive objects like reticles and wafers.
Implementation Method 1
Advantageously, the core module comprises means for providing a laminar flow of a purging gas, particularly an inert gas such as nitrogen. This laminar flow of the purging gas preferably flows vertically downwards through substantially the entire volume of the core module, in order to assist particle sedimentation and prevent cross contamination
Implementation Method 2
the housing is configured to seal an internal volume of the core module, in which at least the handler is located, from the atmosphere surrounding the core module in a substantially gas tight manner. Particularly, this sealing functionality of the housing may prevent any, certain or all constituents, especially particulate constituents, of the surrounding atmosphere from entering the internal volume
Implementation Method 3
This laminar flow of the purging gas preferably flows vertically downwards through substantially the entire volume of the core module, in order to assist particle sedimentation and prevent cross contamination
Data Source
Figure 1
Figure 2
Figure 2A~3
AI summary
The invention relates to an apparatus (200, 200A, 300, 400) for a semiconductor production facility handling an object, the apparatus comprising a core module (100) and at least one functionality module (M...). A core module (100) as well as an operating method for such an apparatus are further aspects of the invention.