Semiconductor Detection Interconnection for Cracking Monitoring

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Solution Overview

Problem

Stacked memory packages often experience interconnection failures due to cracking, leading to inoperability and data loss, as existing technologies lack effective detection mechanisms to predict and prevent such failures before they occur.

Innovation Solution

Incorporation of a detection interconnection layer with serpentine regions and pads not connected to signal interconnections, allowing for early detection of cracking by measuring resistance changes, providing an advance warning before signal interconnections are disconnected.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a stacked memory package is used without detection mechanisms, then the device structure remains simple and cost-effective, but interconnection failures due to cracking cannot be detected early, leading to data loss and complete inoperability

Engineering Contradiction:
Improvedetection capabilityVSAvoidinterconnection structure
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The interconnection structure is segmented into signal interconnections and detection interconnections. The detection interconnections are separate from the signal paths, allowing independent monitoring of substrate cracking without interfering with normal memory operations. This segmentation enables early detection of failures while maintaining the original signal transmission functionality.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Detection interconnections serve as intermediary elements between the substrate structure and the monitoring system. These intermediate conductors detect cracking events through resistance changes and transmit this information to external monitoring circuits, acting as a mediator that enables failure detection without directly participating in signal transmission or data storage operations.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Reliability

If detection interconnections are added to monitor substrate cracking, then early detection of interconnection failures is enabled, but the manufacturing process and device structure become more complex

Engineering Contradiction:
Improvefailure detectionVSAvoidfabrication process
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The detection interconnections are merged with the existing multi-layer conductor structure of the substrate. By integrating detection conductors into the same fabrication process that creates signal interconnections, the patent achieves failure detection capability without requiring entirely separate manufacturing steps. The detection and signal layers are formed using similar photolithography and metallization processes.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The conductor layers in the substrate serve dual functions: they act as both signal interconnections for memory operations and detection interconnections for cracking monitoring. This multi-functionality reduces the need for entirely separate detection circuitry and simplifies the manufacturing process by utilizing existing structural elements for both purposes.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Measurement precision

If serpentine regions are incorporated into detection interconnections, then sensitivity to substrate cracking is enhanced, but the device occupies more area and the layout becomes more complex

Engineering Contradiction:
Improvecracking detection sensitivityVSAvoidsubstrate area
Core Design Contradiction:
Measurement precisionVSArea of stationary object

Solution Approach 1:

The detection interconnections incorporate serpentine (curved) regions instead of straight lines. These curved paths increase the length of the detection conductor within a compact area, enhancing sensitivity to substrate cracking. The serpentine geometry allows the detection interconnection to span a larger effective distance and detect cracking more effectively while occupying minimal substrate area.

Inventive Principle:
Principle #14Spheroidality (Curvature)

Solution Approach 2:

The serpentine configuration transforms the detection interconnection from a simple linear path into a multi-dimensional pattern that efficiently utilizes the available substrate space. By folding the conductor path back and forth in a serpentine pattern, the design achieves high detection sensitivity equivalent to a much longer straight conductor while maintaining a compact footprint on the substrate surface.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables the detection of impending disconnection of signal interconnections, allowing for data retrieval and proactive replacement of defective semiconductor devices, thereby preventing data loss and extending the operational lifespan of memory packages.

Implementation Method 1

allowing for early detection of cracking by measuring resistance changes

Methodology Applied
Scientific EffectElectrical Resistance: Electrical Resistance

Data Source

PatentUS10483236B2Semiconductor device
Publication Date: 2019.11.19 KIOXIA CORP
  • US10483236B2 patent drawing
  • US10483236B2 patent drawing
  • US10483236B2 patent drawing

AI summary

A semiconductor device includes a substrate having first and second principal surfaces, and a semiconductor chip disposed on the first principal surface. The substrate includes a first conductor layer disposed on the first principal surface, a second conductor layer disposed on the second principal surface, at least one third conductive layer between the first conductive layer and the second conductive layer, a detection interconnection disposed in either the first conductive layer or the third conductive layer, and first and second pads disposed on the second conductive layer and connected to the detection interconnection. The detection interconnection is not part of signal interconnections that are used during operation of the semiconductor chip and is not electrically connected to any circuit of the semiconductor chip.