Semiconductor Crystal Removal Apparatus Flux Melting
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Solution Overview
Problem
Conventional methods for removing semiconductor crystals from a crucible using the flux process are inefficient, requiring a long time due to the slow dissolution of solidified flux, and lack a reliable method to determine the completion of crystal separation.
Innovation Solution
A semiconductor crystal removal apparatus that heats the crucible to rapidly melt the solidified flux, allowing the crystal to fall into a receiving unit, and uses a weight-measuring unit to determine when the crystal has been fully removed, with optional features for recycling Na and reducing crystal breakage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If ethanol treatment is used to dissolve solidified flux, then the semiconductor single-crystal can be separated from the flux, but a very long period of time is required for the separation process
Solution Approach 1:
The invention changes the physical state parameter of the flux from solid to liquid by heating it above its melting point (98°C for Na flux). This parameter change transforms the dissolution process into a rapid melting process, reducing the removal time from several hours to just a few minutes while maintaining complete separation of the semiconductor crystal from the flux.
Solution Approach 2:
The invention employs periodic heating and cooling cycles: heating the crucible to melt the flux and separate the crystal, then cooling to solidify the flux again for flux recovery. This periodic action enables both rapid crystal removal and flux reuse, addressing both time efficiency and material conservation.
2Ease of operation
If the crucible is inclined in the treatment vessel, then discharge of hydrogen gas is promoted and ethanol treatment can be effectively performed, but the solidified flux is still gradually dissolved and a long period of time is required
Solution Approach 1:
Instead of relying on gradual chemical dissolution by ethanol, the invention changes the physical state of the flux by heating it above its melting point. This transforms the slow chemical dissolution process into a rapid physical melting process, dramatically reducing removal time while maintaining effective separation.
Solution Approach 2:
The invention replaces the chemical dissolution mechanism (ethanol treatment) with a thermal melting mechanism. By substituting the chemical process with a thermal process, the removal time is significantly reduced while achieving the same separation objective.
3Reliability
If conventional ethanol treatment is used, then the semiconductor single-crystal can be separated from the flux, but separation completion cannot be determined and appropriate operation is required
Solution Approach 1:
The invention incorporates a weight measurement system that provides real-time feedback on the separation process. By monitoring the weight change of the crucible before and after heating, the system can automatically determine when the semiconductor crystal has been completely separated from the flux, eliminating the need for manual inspection and ensuring complete separation.
Solution Approach 2:
The invention replaces manual visual inspection with an automated weight measurement system. This substitution provides objective, quantifiable data on separation completion, making the detection process more reliable and eliminating the difficulty of determining separation completion through conventional methods.
4Productivity
If the flux is melted by heating to rapidly remove the semiconductor crystal, then removal time is shortened, but the crucible must be heated to high temperature
Solution Approach 1:
The invention changes the temperature parameter to just above the flux melting point (98°C for Na flux), which is sufficient to melt the flux and enable crystal removal without requiring excessively high temperatures. This optimized temperature parameter achieves rapid removal while avoiding unnecessary thermal stress on the crucible and equipment.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach significantly shortens the removal time and provides a reliable method to determine the completion of crystal separation, enabling faster production cycles and potential recycling of materials.
Implementation Method 1
a flux can be melted by heating the crucible supported by means of the crucible-supporting unit
Data Source
AI summary
The present invention provides a semiconductor crystal removal apparatus which realizes effective removal of a semiconductor crystal from a crucible through rapid melting of a solidified flux, and a method for producing a semiconductor crystal. The semiconductor crystal removal apparatus includes a crucible support for supporting a crucible so that the opening of the crucible is directed downward; a heater for heating the crucible supported on the crucible support; and a semiconductor crystal receiving net for receiving a semiconductor crystal falling from the opening of the crucible. The semiconductor crystal removal apparatus further includes a determination portion for determining removal of the semiconductor crystal on the basis of a change in weight through falling of the semiconductor crystal.