Semiconductor Data Editing System for Reducing Administrative Load

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Solution Overview

Problem

In semiconductor manufacturing control systems, administrators face difficulties and risks of errors when editing data due to the cumbersome process of manually comparing and editing data between processing apparatuses, which increases the likelihood of operational mistakes.

Innovation Solution

A semiconductor system with an input receiving unit, processing unit, screen creation unit, and display unit that allows for the creation and display of comparison screens and editable editing screens, reducing the administrative load by automating the data editing process and eliminating the need for manual data selection and editing software initiation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If administrators manually compare and edit data between processing apparatuses, then data editing can be performed, but the administrative load increases and operational mistakes become more likely

Engineering Contradiction:
Improvereduction of operational mistakesVSAvoidadministrative load
Core Design Contradiction:
ReliabilityVSEase of operation

Solution Approach 1:

The system enables self-service by automatically comparing data between processing apparatuses and generating edited data without requiring administrator intervention. The comparison unit autonomously retrieves data from multiple apparatuses, performs comparison, and the editing unit generates edited data based on comparison results, eliminating manual administrative tasks and reducing operational mistakes.

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The system performs preliminary actions by automatically comparing data between processing apparatuses before editing is needed. The comparison unit retrieves and compares data in advance, preparing the basis for subsequent editing operations, thereby reducing the administrative burden during the actual editing process and minimizing errors.

Inventive Principle:
Principle #10Preliminary action

2Productivity

If administrators manually initiate editing software and search for data items, then data editing can be performed, but the editing process becomes time-consuming and complex

Engineering Contradiction:
Improveediting process efficiencyVSAvoidtime for data selection and software initiation
Core Design Contradiction:
ProductivityVSLoss of time

Solution Approach 1:

The system merges the data comparison and editing functions into a single integrated process. The comparison unit and editing unit work together to automatically compare data between apparatuses and generate edited data without requiring separate software initiation or manual data selection steps, thereby improving productivity and reducing time loss.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The system replaces the mechanical process of manually initiating software and searching for data items with an automated information processing system. The comparison unit automatically retrieves data and the editing unit generates edited data through automated processes, eliminating the need for manual software initiation and data searching, thus improving efficiency and reducing time consumption.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Data Source

PatentUS10452767B2Semiconductor system and method for supporting data editing
Publication Date: 2019.10.22 TOKYO ELECTRON LTD
  • US10452767B2 patent drawing
  • US10452767B2 patent drawing
  • US10452767B2 patent drawing

AI summary

A semiconductor system according to the present disclosure includes: an input receiving unit that receives comparison process requesting information; a processing unit that acquires a plurality of pieces of process related information related to a semiconductor process performed by a semiconductor manufacturing apparatus, based on the comparison process requesting information received by the input receiving unit; a screen creation unit that creates a comparison screen for comparing the plurality of pieces of process related information acquired by the processing unit; and a display unit that displays the comparison screen created by the screen creation unit. When the input receiving unit receives a selection of an arbitrary item included in the plurality of pieces of process related information displayed on the comparison screen, the screen creation unit creates an editing screen on which, among the plurality of pieces of process related information, process related information including the arbitrary item is editable.