Semiconductor Data Display for Verifying Statistical Conditions
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Solution Overview
Problem
In semiconductor manufacturing, there is a need to check and verify the tangible calculation conditions used in statistical processing of measured data, as existing methods do not effectively display or allow for the inspection of these conditions.
Innovation Solution
A method is provided for a semiconductor manufacturing apparatus to obtain and display statistical processing conditions by reading them from a setting file, calculating statistical values, and displaying them along with time-series measured data, allowing for identification and correction of these conditions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If statistical processing is applied to measured data to obtain calculated values, then data processing capability is improved, but transparency of calculation conditions deteriorates
Solution Approach 1:
The system provides feedback by displaying the statistical processing conditions (calculation formulas and data ranges) on the display unit. This allows operators to verify what calculations are being performed on their measured data, restoring transparency while maintaining the data processing capability.
Solution Approach 2:
The control unit acts as an intermediary between the data processing function and the display function. It not only performs the statistical calculations but also retrieves and presents the calculation conditions, serving as a bridge that maintains both processing capability and transparency.
2Measurement precision
If calculation processes are applied to measured data, then analytical capability is improved, but verifiability of calculation conditions deteriorates
Solution Approach 1:
The display unit provides visual feedback showing the statistical processing conditions including calculation formulas and data ranges. This enables operators to verify the analytical processing being performed, making the previously hidden calculation conditions visible and checkable.
Solution Approach 2:
The system creates a copy or representation of the calculation conditions (formulas and ranges) and displays it on the display unit. This copied information allows operators to verify the analytical capability without needing to access the internal processing logic directly.
3Ease of operation
If statistical values are displayed without showing processing conditions, then display simplicity is improved, but inspectability of calculation methods deteriorates
Solution Approach 1:
The system merges the display of statistical values with the display of their corresponding processing conditions on the same display unit. This combination maintains simplicity by showing everything in one place while improving inspectability by including the calculation methods alongside the results.
Solution Approach 2:
The control unit serves as an intermediary that prepares and presents both the statistical values and their processing conditions together. It manages the information flow to ensure both simplicity and inspectability are achieved through unified presentation.
Data Source
AI summary
An object of the invention is to make a tangible calculation condition in calculation processing, that is applied to measured data, be able to be checked in a semiconductor manufacturing apparatus. A method for displaying information in a semiconductor manufacturing apparatus comprises steps for: obtaining a single piece or plural pieces of time-series measured data relating to processing of a substrate in the semiconductor manufacturing apparatus; obtaining one or plural statistical values by applying statistical processing to the single piece or plural pieces of time-series measured data; based on selection of a single statistical value from the one or plural statistical values, identifying a statistical processing condition that was used in statistical processing performed for obtaining the selected single statistical value; and displaying the identified statistical processing condition.