Semiconductor Detector Barrier Electrode Charge Sharing

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Solution Overview

Problem

Pixel-based semiconductor detectors face challenges in charge distribution and energy spectrum resolution due to charge sharing between adjacent pixels, leading to false signals and difficulties in determining the accurate position of incident radiation, especially as pixel size decreases.

Innovation Solution

Incorporating a barrier electrode on the periphery of pixel cathodes or anodes to block radiation signals between pixels, suppressing charge sharing and improving imaging resolution by ensuring radiation is incident on specific pixels.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If pixel size is decreased to improve spatial resolution, then spatial resolution is improved, but charge distribution problems become more severe causing false signals

Engineering Contradiction:
Improvespatial resolutionVSAvoidsignal accuracy
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The detector is segmented into discrete pixel elements with barrier structures between them. This segmentation isolates the charge collection regions, preventing charge sharing between adjacent pixels while maintaining fine spatial resolution. Each pixel acts as an independent detection unit with its own barrier electrode.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The potential harm of charge diffusion and sharing is converted into a benefit by using barrier electrodes to define precise collection regions. The barrier structures transform the problematic charge sharing effect into a controlled charge confinement mechanism, ensuring that charges are collected only by the intended pixel.

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

2Measurement precision

If barrier electrode is added to suppress charge sharing, then energy spectrum resolution is improved, but device complexity increases

Engineering Contradiction:
Improveenergy spectrum resolutionVSAvoidelectrode structure complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The barrier electrode structure is merged with the pixel electrode fabrication process. The barrier electrodes are formed as integral parts of the pixel electrode structure, allowing simultaneous fabrication of multiple electrode layers in a unified manufacturing process, thereby reducing overall device complexity despite the additional functional layer.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The barrier electrodes serve multiple functions: they prevent charge sharing between pixels, define precise charge collection regions, and maintain electrical isolation between adjacent pixels. This multi-functionality reduces the need for additional separate structures, simplifying the overall device design while achieving improved energy spectrum resolution.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The barrier electrode effectively reduces charge sharing, enhancing the energy spectrum resolution and imaging accuracy of semiconductor detectors by ensuring that radiation signals are collected by intended pixels, thereby improving detector performance.

Implementation Method 1

free charges will diffuse during drifting, and some of the charges will be collected by adjacent pixels, resulting in charge distribution problems

Methodology Applied
Scientific EffectCharge sharing:

Implementation Method 2

free charges will diffuse during drifting

Methodology Applied
Scientific EffectCharge diffusion: Diffusion

Implementation Method 3

A generated free charge, when drifting in a region distant to pixel electrodes, induces very small charge on a single pixel electrode

Methodology Applied
Scientific EffectCharge induction: Electrostatic Induction

Implementation Method 4

induced charges contributed by drifting of only one type of carriers

Methodology Applied
Scientific EffectCharge drifting:

Data Source

PatentUS10388818B2Semiconductor detector
Publication Date: 2019.08.20 NUCTECH CO LTD
  • US10388818B2 patent drawing
  • US10388818B2 patent drawing
  • US10388818B2 patent drawing

AI summary

There is provided a semiconductor detector. According to an embodiment, the semiconductor detector may include a semiconductor detection material including a first side and a second side opposite to each other. One of the first side and the second side is a ray incident side that receives incident rays. The detector may further include a plurality of pixel cathodes disposed on the first side and a plurality of pixel anodes disposed on the second side. The pixel anodes and the pixel cathodes correspond to each other one by one. The detector may further include a barrier electrode disposed on a periphery of respective one of the pixel cathodes or pixel anodes on the ray incident side. According to the embodiment of the present disclosure, it is possible to effectively suppress charge sharing between the pixels and thus to improve an imaging resolution of the detector.