Semiconductor Detector Pixel Anode Charge Sharing Correction

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Solution Overview

Problem

Pixel-based semiconductor detectors face challenges in charge distribution and energy spectrum resolution due to charge sharing among adjacent pixels, leading to false signals and difficulties in accurately locating incident radiation positions, especially as pixel size decreases.

Innovation Solution

Incorporating central and intermediate anodes between pixel anodes, with a signal processing circuit that determines detection signals through weighted sums based on signals collected from these additional anodes, to correct for charge sharing and improve energy resolution and signal-to-noise ratio.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If pixel size is decreased to improve spatial resolution, then spatial resolution is improved, but charge sharing among adjacent pixels increases leading to false signals and degraded energy spectrum resolution

Engineering Contradiction:
Improveenergy spectrum resolutionVSAvoidcharge distribution problem
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The anode is segmented into multiple types of electrodes: pixel anodes for primary signal detection, intermediate anodes positioned between adjacent pixel anodes to detect charge sharing, and central anodes positioned at centers of groups of pixel anodes. This segmentation allows the system to distinguish between true signals and charge sharing events, resolving the charge distribution problem while maintaining high spatial resolution.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Intermediate anodes serve as intermediary elements between adjacent pixel anodes. When charge diffuses between pixels, the intermediate anodes detect these shared charges, acting as mediators to identify and correct charge sharing events. This prevents false signals in pixel anodes while preserving the benefits of small pixel size for spatial resolution.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Measurement precision

If pixel size is decreased to improve spatial resolution, then spatial resolution is improved, but false signals increase due to charge sharing among adjacent pixels

Engineering Contradiction:
Improvespatial resolutionVSAvoidsignal accuracy
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

Different regions of the anode structure are assigned different functions with local quality optimization: pixel anodes have high sensitivity for spatial resolution, intermediate anodes have charge sharing detection capability, and central anodes provide additional reference signals. This local differentiation allows each element to optimize its specific function while collectively solving the false signal problem.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The signal processing circuit uses feedback from intermediate anodes and central anodes to correct signals from pixel anodes. By comparing signals across multiple electrode types and applying correction algorithms, the system identifies and eliminates false signals caused by charge sharing, thereby improving signal accuracy while maintaining high spatial resolution.

Inventive Principle:
Principle #23Feedback

3Measurement precision

If additional anodes (central and intermediate) are added to correct charge sharing, then energy resolution and signal-to-noise ratio are improved, but device complexity increases

Engineering Contradiction:
Improveenergy resolutionVSAvoidanode structure complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

Multiple electrode types (pixel anodes, intermediate anodes, central anodes) are merged into a single integrated anode structure that functions as a unified detection system. The signal processing circuit combines signals from all electrode types and applies correction algorithms, achieving improved energy resolution and signal-to-noise ratio while managing complexity through integrated design rather than separate systems.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances the energy resolution and signal-to-noise ratio, enabling more accurate radiation imaging by effectively addressing charge distribution issues and improving the detection of radiation positions.

Implementation Method 1

a pixel-based detector has a nonuniform electric field distribution therein. A generated free charge, when drifting in a region distant to pixel electrodes, induces very small charge on a single pixel electrode

Methodology Applied
Scientific EffectCharge generation and drift: Photoelectric Effect

Data Source

PatentEP3290956B1Semiconductor detector
Publication Date: 2020.05.13 NUCTECH CO LTD
  • EP3290956B1 patent drawingFigure 1
  • EP3290956B1 patent drawingFigure 2~3
  • EP3290956B1 patent drawingFigure 4~5

AI summary

There is provided a semiconductor detector (100). According to an embodiment, the semiconductor detector may include a semiconductor detection material (101) including a first side (101S-1) and a second side (101S-2) opposite to each other, a cathode (103) disposed on the first side, and an anode (105) disposed on the second side. The anode includes an array of pixel anodes (201) defining detection pixels of the semiconductor detector, and intermediate anodes (203) disposed between adjacent ones of the pixel anodes. According to an embodiment of the present disclosure, it is possible to achieve signal correction to improve the energy resolution and the signal-to-noise ratio of the detector.