Semiconductor Transport System with Detourable Local Vehicles

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Solution Overview

Problem

Existing transport systems in semiconductor plants face inefficiencies due to limited buffer capacity and frequent blocking of local vehicles, leading to reduced transport capacity and increased waiting times when load ports are occupied.

Innovation Solution

A transport system with multiple local vehicle routes and buffers arranged in a grid pattern, allowing local vehicles to detour around each other and change directions, combined with overhead travelling vehicles that can drop off articles at buffers instead of load ports, enhancing buffer and transport capacity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If multiple separate apparatuses (washing machine, dryer, ironing device) are used for complete clothes treatment, then treatment effectiveness is improved, but device complexity and space requirements increase

Engineering Contradiction:
Improvetreatment effectivenessVSAvoiddevice complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent combines washing, drying, and ironing functions into a single integrated apparatus. The washing machine includes an ironing device with heating element and pressing mechanism, while the dryer can function as an ironing device, eliminating the need for separate appliances and reducing overall system complexity.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The drying apparatus is designed to serve multiple functions: it can operate as a standard dryer, or transform into an ironing device by deploying a pressing mechanism and heating element. This multi-functionality allows one apparatus to replace multiple separate devices.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Reliability

If clothes are washed and dried separately in different apparatuses, then each apparatus can be optimized for its specific function, but loss of time occurs due to transfer and waiting

Engineering Contradiction:
Improvefunction optimizationVSAvoidtime loss
Core Design Contradiction:
ReliabilityVSLoss of time

Solution Approach 1:

By integrating washing and ironing functions in one apparatus, and drying and ironing functions in another, the patent eliminates the need to transfer clothes between separate washing-drying-ironing appliances, significantly reducing handling time and process continuity.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The drying apparatus is pre-configured with ironing capabilities (heating element and pressing mechanism) that can be activated after drying completes. This preliminary preparation allows immediate ironing without removing clothes from the dryer, eliminating waiting time.

Inventive Principle:
Principle #10Preliminary action

3Reliability

If conventional drying and ironing processes are used, then energy consumption is high, but treatment quality is maintained

Engineering Contradiction:
Improvetreatment qualityVSAvoidenergy consumption
Core Design Contradiction:
ReliabilityVSUse of energy by moving object

Solution Approach 1:

The patent enables continuous operation where clothes proceed directly from washing to drying to ironing without intermediate removal or cooling periods. The drying apparatus maintains heat during the transition to ironing mode, eliminating energy-wasting cooling and re-heating cycles.

Inventive Principle:
Principle #20Continuity of useful action

Solution Approach 2:

The system dynamically adjusts temperature and humidity parameters during the drying-to-ironing transition. By maintaining optimal thermal conditions from drying into ironing, the apparatus reduces the energy required to reheat clothes for ironing while preserving fabric treatment quality.

Inventive Principle:
Principle #35Parameter changes

Data Source

PatentEP3144252B1Carrying system and carrying method
Publication Date: 2021.06.09 MURATA MASCH LTD
  • EP3144252B1 patent drawingFigure 1
  • EP3144252B1 patent drawingFigure 2
  • EP3144252B1 patent drawingFigure 3

AI summary

Articles are flexibly delivered to and removed from load ports using a large number of buffers and a large number of local vehicles that can freely choose a travelling path. A plurality of overhead travelling vehicles each having a hoist travel along an overhead travelling vehicle travelling route. A local vehicle travelling route is disposed under the overhead travelling vehicle travelling route and over a plurality of load ports at a position higher than the load ports. A plurality of local vehicles each including a hoist travel along the local vehicle travelling route. A plurality of buffers are disposed along the local vehicle travelling route. The local vehicle travelling route includes a plurality of local vehicle travelling routes that are provided in parallel, and the local vehicles are configured to diverge and merge from one local vehicle travelling route to another local vehicle travelling route. The local vehicles transport articles between a load port and a buffer under control of a controller. The overhead travelling vehicles, under control of the controller, transfer articles to and from a load port or a buffer and transport articles between a load port or a buffer and a section other than the local vehicle travelling routes.