Semiconductor Die Diode Chains for Accurate On-Chip Temperature Sensing

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Solution Overview

Problem

Existing methods for temperature measurement in semiconductor dies are prone to inaccuracies due to parasitic resistive elements and may require additional active device area, which can be a challenge in high voltage or discrete power switch applications.

Innovation Solution

The use of two diode chains with different numbers of junctions or doping concentrations, connected in parallel, allows for a differential readout of temperature through the voltage difference between the chains, reducing the impact of parasitic resistive elements and minimizing the active device area required.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Area of stationary object

If a single diode chain is used for temperature sensing, then the device area is minimized, but parasitic resistive elements reduce measurement accuracy

Engineering Contradiction:
Improveactive device areaVSAvoidtemperature measurement accuracy
Core Design Contradiction:
Area of stationary objectVSMeasurement precision

Solution Approach 1:

The temperature sensing function is segmented into two separate diode chains with different numbers of junctions (n1 and n2). Each chain independently responds to temperature, and their differential voltage output cancels out common-mode parasitic resistive effects while preserving temperature sensitivity. This segmentation allows accurate temperature measurement without requiring large compensation circuits.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention changes the parameter of junction number (n1 ≠ n2) between the two diode chains to create differential temperature sensitivity. By configuring chains with different junction counts, the system generates a voltage difference that is inherently proportional to temperature while rejecting parasitic resistance effects, achieving high precision without increasing device area.

Inventive Principle:
Principle #35Parameter changes

2Measurement precision

If parasitic resistive elements are compensated using traditional methods, then measurement accuracy improves, but additional active device area is required

Engineering Contradiction:
Improvetemperature measurement accuracyVSAvoidactive device area
Core Design Contradiction:
Measurement precisionVSArea of stationary object

Solution Approach 1:

The invention extracts and eliminates the harmful effect of parasitic resistive elements through differential measurement. By subtracting the voltage outputs of two diode chains with different junction numbers, the common-mode parasitic resistances are automatically rejected, isolating only the temperature-dependent differential signal. This removes the need for separate compensation circuits that would consume additional area.

Inventive Principle:
Principle #2Taking out (Extraction)

3Measurement precision

If bipolar transistors are used for temperature sensing, then temperature measurement is achieved, but integration complexity and material effort increase

Engineering Contradiction:
Improvetemperature sensing capabilityVSAvoidintegration complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The invention uses simplified diode chain structures that replicate the temperature sensing function of bipolar transistors without requiring complex bipolar device fabrication. By copying the essential pn-junction temperature response in a simpler diode configuration, the system achieves comparable temperature sensing capability with reduced integration complexity and material requirements.

Inventive Principle:
Principle #26Copying

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach improves the accuracy of temperature measurement by isolating the voltage difference due to junction properties, while also reducing the material and integration effort compared to using a single diode chain or a bipolar transistor.

Implementation Method 1

the different number and/or doping of the junctions results in a different forward voltage. The voltage difference between the diode chains will depend on the temperature

Methodology Applied
Scientific EffectTemperature-dependent forward voltage of diode junctions: Diode

Data Source

PatentUS20250172438A1Semiconductor die and corresponding method
Publication Date: 2025.05.29 INFINEON TECHNOLOGIES AG
  • US20250172438A1 patent drawing
  • US20250172438A1 patent drawing
  • US20250172438A1 patent drawing

AI summary

The disclosure relates to a semiconductor die, comprising: a first diode chain having a number n1 of diode junctions connected in series, where n1≥1; a second diode chain having a number n2 of diode junctions connected in series, where n2≥1; the first diode chain and the second diode chain to be biased with the same current as a temperature sensor, wherein the first diode chain and the second diode chain differ from each other in their respective number n1, n2 of junctions and/or in a doping concentration of at least one of the junctions.