Semiconductor Die Pad Through Hole for Wire Bonding

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Solution Overview

Problem

Existing semiconductor devices face issues with damage to the connecting portion between wires and a die pad due to delamination of the adhesive interface, which can lead to decreased heat dissipation efficiency when measures are taken to prevent delamination.

Innovation Solution

A semiconductor device design featuring a die pad with a wire-bonding region covered by a metal film and a through hole penetrating through the die pad, where the encapsulation body is structured with portions over, under, and buried in the die pad, connecting these portions to alleviate stress and prevent delamination.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If measures are taken to prevent delamination of the adhesive interface between the die pad and encapsulation body, then reliability of the wire connection is improved, but heat dissipation efficiency deteriorates

Engineering Contradiction:
Improvebonding strength between wire and die padVSAvoidheat dissipation efficiency
Core Design Contradiction:
ReliabilityVSLoss of energy

Solution Approach 1:

The encapsulation body is segmented into multiple portions: a first portion formed over the die pad, a second portion formed under the die pad, and a third portion buried in the through hole. This segmentation allows the encapsulation body to provide mechanical support and prevent delamination at multiple locations simultaneously, improving reliability without requiring excessive adhesive material that would impede heat dissipation.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

A through hole penetrating through the die pad in the thickness direction is introduced, creating a vertical dimension for stress distribution. The third portion of the encapsulation body buried in this through hole provides reinforcement from both the top and bottom surfaces, distributing mechanical stress vertically and preventing delamination while maintaining thermal pathways through the die pad.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Reliability

If the encapsulation body is formed to cover the entire die pad surface, then delamination is prevented, but heat dissipation performance decreases

Engineering Contradiction:
Improveprevention of delaminationVSAvoidheat dissipation performance
Core Design Contradiction:
ReliabilityVSTemperature

Solution Approach 1:

The encapsulation body provides reinforcement at specific critical locations rather than uniformly covering the entire die pad. The first portion covers the wire-bonding region where delamination is most likely to occur, the second portion supports the bottom surface, and the third portion reinforces the through hole area. This localized quality approach prevents delamination at critical stress points while allowing heat to dissipate through other areas of the die pad.

Inventive Principle:
Principle #3Local quality

3Stress or pressure

If a through hole is formed in the die pad, then stress on the wire-bonding region is reduced, but structural integrity of the die pad may be compromised

Engineering Contradiction:
Improvestress on wire-bonding regionVSAvoidstructural integrity of die pad
Core Design Contradiction:
Stress or pressureVSStrength

Solution Approach 1:

The third portion of the encapsulation body is embedded within the through hole, merging the structural support function with the stress-relief function. This embedded portion acts as a mechanical anchor that distributes stress from the wire-bonding region across the through hole walls and to the second portion of the encapsulation body, reducing localized stress while maintaining overall structural integrity through composite reinforcement.

Inventive Principle:
Principle #5Merging (Combining)

Data Source

PatentUS10770375B2Semiconductor device
Publication Date: 2020.09.08 RENESAS ELECTRONICS CORP
  • US10770375B2 patent drawing
  • US10770375B2 patent drawing
  • US10770375B2 patent drawing

AI summary

A semiconductor device according to one embodiment of the present invention includes a wire electrically connecting a die pad and a semiconductor chip mounted on the die pad to each other, and an encapsulation body encapsulating the semiconductor chip. The die pad includes a wire-bonding region to which the wire is connected and a through hole penetrating through the die pad in a thickness direction. The wire-bonding region is covered by a metal film partially covering the die pad. The through hole is formed at a position overlapping the metal film. The encapsulation body includes a first portion formed over the die pad, a second portion formed under the die pad, and a third portion buried in the through hole of the die pad, wherein the first portion and the second portion of the encapsulation body are connected with each other via the third portion.