Semiconductor Material Dispatching via Simulated Moving Paths

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Solution Overview

Problem

Semiconductor production lines face challenges in achieving better quality, lower manufacturing costs, and faster response times with existing dispatching systems, which affect yield and flexibility.

Innovation Solution

A method and apparatus for material dispatching in semiconductor production that involves obtaining a material listing and process sequence, determining current statuses, simulating and calculating multiple moving paths, selecting the most efficient path, and storing it in a dispatching queue for optimized material dispatching.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If existing dispatching systems are used in semiconductor production lines, then basic material dispatching can be performed, but process efficiency and yield are insufficient

Engineering Contradiction:
Improveprocess efficiencyVSAvoidmanufacturing time
Core Design Contradiction:
ProductivityVSLoss of time

Solution Approach 1:

The system performs preliminary simulation and calculation of multiple moving paths before actual material dispatching. By pre-calculating the most efficient paths and storing them in a dispatching queue, the system avoids time-consuming decision-making during actual production, thereby improving process efficiency and reducing manufacturing time

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The system dynamically determines current status of materials and adaptively selects moving paths based on real-time conditions. The dispatching system can adjust material movement sequences according to changing production states, optimizing process efficiency while minimizing manufacturing time

Inventive Principle:
Principle #15Dynamics

2Adaptability or versatility

If existing dispatching systems are used in semiconductor production lines, then basic material handling can be achieved, but flexibility and response capability are limited

Engineering Contradiction:
Improveresponse capabilityVSAvoiddispatching system complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The dispatching system is segmented into distinct functional modules: data acquisition for obtaining material listings and process sequences, status determination for inquiring material states, simulation and calculation for generating moving paths, and dispatching execution. This modular architecture improves response capability while managing system complexity through clear separation of concerns

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The system continuously inquires about current status of materials and uses this feedback information to dynamically adjust moving path selections. The feedback mechanism enables the system to respond adaptively to changing production conditions, enhancing flexibility without requiring overly complex centralized control

Inventive Principle:
Principle #23Feedback

Data Source

PatentUS12476123B2Method and apparatus for material dispatching, and vertical furnace apparatus
Publication Date: 2025.11.18 BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
  • US12476123B2 patent drawing
  • US12476123B2 patent drawing
  • US12476123B2 patent drawing

AI summary

A method for dispatching a material includes obtaining a material listing and a process sequence, inquiring about each material in the material listing to determine a current status of each material, according to the current status of each material and the process sequence, simulating and calculating a plurality of moving paths for materials in the material listing and recording process time efficiencies of the plurality of moving paths, using a moving path with a highest process time efficiency among the plurality of moving paths as a selected moving path and storing the selected moving path in a dispatching queue, and performing a dispatching on the materials, according to the selected moving path in the dispatching queue. Each moving path includes a collection of moving sequences of materials in the moving path on a line of time.