Semiconductor Dispatching via Self-Organizing Negotiation Units

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Solution Overview

Problem

Semiconductor wafer manufacturing facilities face complexity in production dispatching due to high capital investment, fluctuating demand, and equipment bottlenecks, requiring efficient dynamic dispatching methods to enhance production efficiency and reduce downtime.

Innovation Solution

A dynamic dispatching method based on self-organization (DDRSO) is introduced, involving role definitions of self-organization units, a negotiation mechanism, and decision-making processes to optimize dispatching, which can be extended to Extended-DDRSO for varying workload levels.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If traditional heuristic dispatching strategies are used, then the system is easier to operate, but productivity and on-time delivery rate deteriorate

Engineering Contradiction:
ImprovethroughputVSAvoiddispatching complexity
Core Design Contradiction:
ProductivityVSEase of operation

Solution Approach 1:

The dispatching system is segmented into multiple self-organization units (SOUs), each responsible for specific machines or machine groups. Each SOU independently makes dispatching decisions for its designated equipment, dividing the complex global dispatching problem into smaller, manageable local decisions. This segmentation enables the system to achieve high productivity through distributed intelligence while maintaining operational simplicity.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Each self-organization unit autonomously manages its own dispatching decisions without requiring centralized control. The SOUs self-organize and self-adjust based on real-time system state, automatically optimizing local dispatching to contribute to global productivity. This self-service mechanism eliminates the need for complex centralized dispatching algorithms while improving throughput.

Inventive Principle:
Principle #25Self-service

2Reliability

If dynamic dispatching methods are implemented, then on-time delivery rate improves, but device complexity increases

Engineering Contradiction:
Improveon-time delivery rateVSAvoiddispatching system complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The dispatching system dynamically adapts to changing production conditions through self-organization units that continuously monitor and respond to real-time system state. Each SOU adjusts its dispatching strategy based on current workload, machine status, and delivery requirements, enabling the system to maintain high on-time delivery rates while managing complexity through localized dynamic decision-making rather than global complexity.

Inventive Principle:
Principle #15Dynamics

3Productivity

If self-organization units are introduced, then work movement efficiency improves, but the negotiation mechanism increases system complexity

Engineering Contradiction:
Improvework movementVSAvoidnegotiation mechanism complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The negotiation mechanism between self-organization units operates through simple feedback loops where SOUs exchange information about workload, capacity, and delivery priorities. Each SOU receives feedback from neighboring SOUs and adjusts its dispatching decisions accordingly. This feedback-based negotiation achieves efficient work movement across the manufacturing system while keeping the interaction rules simple and manageable.

Inventive Principle:
Principle #23Feedback

Data Source

PatentUS12131928B2Dynamic dispatching method for semiconductor manufacturing system
Publication Date: 2024.10.29 TONGJI UNIV
  • US12131928B2 patent drawing
  • US12131928B2 patent drawing
  • US12131928B2 patent drawing

AI summary

A dynamic dispatching method for semiconductor manufacturing system relates to a dynamic dispatching rule based on self-organization for dispatching in a semiconductor manufacturing system, including S1: setting roles and parameters of self-organization units, and defining key nodes in a production environment; S2: constructing a negotiation mechanism between the self-organization units, and designing a decision-making and dispatching subject ESOU; S3: according to a decision instruction of the ESOU, designing a LSOU allocation dispatching unit for distinguishing single-batch processing and multi-batch processing; and S4: designing a dispatching mechanism based on the self-organization units to implement dynamic semiconductor dispatching. The dynamic dispatching method includes three aspects: role definitions of self-organization units, a negotiation mechanism between the self-organization units and a decision-making method thereof. The simulation based on a real industry benchmark production line shows that the method improves the work movement, throughput and on-time delivery rate by 4.9%, 9.06% and 20.23%.